Browse > Article
http://dx.doi.org/10.7471/ikeee.2017.21.4.404

Flexible Durability and Characteristics of ZnO, AZO and ITO Thin Films Grown by Aerosol Deposition Process  

Lee, Dong-Won (Material Technology Center, Korea Testing Laboratory)
Cho, Myung-Yeon (Dept. of Electronic Materials Engineering, Kwangwoon University)
Lee, Sang-Hun (Material Technology Center, Korea Testing Laboratory)
Kim, Yong-Nam (Material Technology Center, Korea Testing Laboratory)
Lee, Daeseok (Dept. of Electronic Materials Engineering, Kwangwoon University)
Koo, Sang-Mo (Dept. of Electronic Materials Engineering, Kwangwoon University)
Oh, Jong-Min (Dept. of Electronic Materials Engineering, Kwangwoon University)
Publication Information
Journal of IKEEE / v.21, no.4, 2017 , pp. 404-407 More about this Journal
Abstract
We investigated the microstructure, electrical and optical characteristics of ZnO, AZO and ITO films using aerosol deposition process. As gas consumption increased, the electrical and optical characteristics of ZnO, AZO and ITO films were improved, and electrical and optical characteristics of ZnO, AZO and ITO films with a thickness of 400 nm were successfully fabricated on PET substrates at room temperature. The mechanical flexibility durability test shows that the ZnO films can withstand 5,000 cycles and AZO and ITO films occurs to crack in films with degradation of resistance and transmittance. Even though the AZO and ITO films shows slightly lower durability than the ZnO films, this is expected to improve performance of films through optimized processing condition and particle size control.
Keywords
ZnO; AZO; ITO; Aerosol deposition; Bending fatigue test;
Citations & Related Records
연도 인용수 순위
  • Reference
1 K.-H. Lee, S.-M. Kim, J. Jeong, Y. Park, H. Song, J. Park, K.-H. Lim, J.-H. Kim, Y. S. Kim, H. C. Ko, I. K. Kwon, and G.-Y. Jung, "All-solution-processed transparent thin film transistor and its application to liquid crystals driving," Adv. Mater., vol.25, no.23, pp. 3209-3214, Jun. 2013. DOI: 10.1002/adma.201300084   DOI
2 J.K. Wassei and R.B. Kaner, "Graphene a promising transparent conductor," Materialstoday, vol.13, no.3, pp. 52-59, Mar. 2010. DOI:.10.1016/S1369-7021(10)70034-1
3 D. Horwat and A. Billard, "Effects of substrate position and oxygen gas flow rate on the properties of ZnO:Al films prepared by reactive co-sputtering," Thin solid films, vol.305, no.13, pp. 5444-5888, May. 2007. DOI:.10.1016/j.tsf.2006.12.188
4 J. Akedo, "Aerosol deposition of ceramic thick films at room temperature: densification mechanism of ceramic layers," J. Am. Ceram. Soc., vol.89, no.6, pp. 1834-1839, Jun. 2006. DOI: 10.1111/j.1551-2916.2006.01030.x   DOI
5 D. W. Lee, H. J. Kim, Y. H. Kim, Y. H. Yun, S. M. Nam, "Growth process of ${\alpha}-Al_2O_3$ ceramic films on metal subsrates fabricated at room temperature by aerosol deposition," J . Am. Ceram. Soc., vol.94, no.9, pp. 3131-3138, Sep. 2011.DOI: 10.1111/j.1551-2916.2011.04493.x   DOI