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http://dx.doi.org/10.7471/ikeee.2017.21.3.252

Failure Analysis and Accelerated Life Test of MoxW1-xSi2 Haters Fabricated by SHS process  

Lee, Dong-Won (Material Technology Center, Korea Testing Laboratory)
Lee, Sang-Hun (Material Technology Center, Korea Testing Laboratory)
Kim, Yong-Nam (Material Technology Center, Korea Testing Laboratory)
Lee, Heesoo (School of Materials Science and Engineering, Pusan National University)
Lee, Sung-Chul (Production Development Headquarter, Winner Technology)
Koo, Sang-Mo (Dept. of Electronic Materials Engineering, Kwangwoon University)
Oh, Jong-Min (Dept. of Electronic Materials Engineering, Kwangwoon University)
Publication Information
Journal of IKEEE / v.21, no.3, 2017 , pp. 252-255 More about this Journal
Abstract
$Mo_xW_{1-x}Si_2$ heaters were fabricated by self-propagating high-temperature synthesis (SHS) process and post sintering process. To validate the reliability of the $Mo_xW_{1-x}Si_2$ heaters, the accelerated life test (ALT) was conducted, and then lifetime to $Mo_xW_{1-x}Si_2$ heaters was estimated by using Minitab programs. Also, the failure analysis of $Mo_xW_{1-x}Si_2$ heaters after ALT was performed through electrical and structural properties. As the results, it was confirmed that the dominant failure mode of $Mo_xW_{1-x}Si_2$ heaters is the crack formation in heaters and the delamination of protective $SiO_2$ layers.
Keywords
$Mo_xW_{1-x}Si_2$; Heater; SHS; Accelerated life test; Failure analysis;
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