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http://dx.doi.org/10.7471/ikeee.2015.19.4.486

Analysis of Low Frequency Noise Variation in Temperature Sensor With Bi2Mg2/3Nb4/3O7  

Cho, Il Hwan (Dept. of Electronic Engineering, Myongji University)
Seo, Dongsun (Dept. of Electronic Engineering, Myongji University)
Publication Information
Journal of IKEEE / v.19, no.4, 2015 , pp. 486-490 More about this Journal
Abstract
Sensitivity characteristics of temperature sensor with $Bi_2Mg_{2/3}Nb_{4/3}O_7$ (BMNO) layer were investigated with low frequency noise measurement. Temperature sensor with BMNO layer had high reliability and high sensitivity comparing with conventional MOS type temperature sensor. Annealing temperature variation effects with $600^{\circ}C$, $700^{\circ}C$ and $800^{\circ}C$ were measured and analyzed. Annealing temperature determines trap distribution and $700^{\circ}C$ annealing sample has different pattern comparing with other samples. Results of low frequency noise can offer the design guide of temperature sensor performance.
Keywords
temperature sensor; annealing process; low frequency noise. interface state; sensitivity;
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1 Chih-Yao Wang and Jenn-Gwo Hwu, "Characterization of Stacked Hafnium Oxide ($HfO_2$)/ Silicon Dioxide ($SiO_2$) Metal-Oxide-Semiconductor Tunneling Temperature Sensors," Journal of The Electrochemical Society, 157(10), pp.J324-J328, 2010   DOI
2 Yen-Hao Shih and Jenn-Gwo Hwu, "An On-Chip Temperature Sensor by Utilizing a MOS Tunneling Diode," IEEE Electron Device Letters, 22(6), pp.299-301, 2001   DOI
3 Yen-Hao Shih, Shian-Ru Lin, Tsung-Miau Wang and Jeen-Gwo Hwu, "High Sensitive and wide Detecting Range MOS Tunneling Tmperature Sensors for On-Chip Temperature Detection," IEEE Transactions on Electron Devices, 51(9), pp. 1514-1521, 2004   DOI
4 B. Ricco, G. Gozzi and M. Lanzoni, "Modeling and Simulation of Stress-Induced leakage Current in Ultrathin $SiO_2$ Films," IEEE Transactions on Electron Devices, 45(7), pp. 1554-1560, 1998   DOI
5 Jae-Min Lee, In-Tak Cho, Jong-Ho Lee, Soon-Gil Yoon and Il Hwan Cho, "Enhancement of Temperature Sensitivity for Metal-Insulator- Semiconductor (MIS) Tunneling Temperature Sensors by Using $Bi_2Mg_{2/3}Nb_{4/3}O_7$ (BMNO) film," Japanese Journal of Applied Physics, 51, pp.080206-080208, 2012
6 David P. Cann, Clive A. Randall and Thomas R. Shrout, "Investigation of the dielectric properties of bismuth pyrochlores," Solid state communications, 100, pp.529-534, 1996   DOI
7 Nak-Jin Seong, Jong-Hyun Park, and Soon-Gil Yoon, "Effect of excess bismuth concentration on dielectric and electrical properties of fully crystallized $Bi_2Mg_{2/3}Nb_{4/3}O_7$ thin films," Applied Physics Letters, 91, pp.072904, 2007   DOI
8 J. I. Lee, J. Brini, A. Chovet and C. A. Bimitriadis, "Flicker noise by random walk of electrons at the interface in nonideal Schottky diodes," Solid State Electronics, 43, pp.2185-2189, 1999   DOI
9 J. I. Lee, I. K. Han, D. C. Heo, J. Brini, A. Chovet, C. A. Dimitriadis and J. C. Jeong, "Low frequency noise spectroscopy for schottky contacts," Journal of the Korean Physical Society, 37(6), pp.966-970, 1999