Fabrication and characterization of n-IZO / p-Si and p-ZnO:(In, N) / n-Si thin film hetero-junctions by dc magnetron sputtering |
Dao, Anh Tuan
(Department of Applied Physics, Faculty of Physics and Engineering Physics, University of Science)
Phan, Thi Kieu Loan (Department of Applied Physics, Faculty of Physics and Engineering Physics, University of Science) Nguyen, Van Hieu (Department of Physics and electronics, Faculty of Physics and Engineering Physics, University of Science) Le, Vu Tuan Hung (Department of Applied Physics, Faculty of Physics and Engineering Physics, University of Science) |
1 | Jiming Bian, Xiaomin Li, Lidong Chen, Qin Yao, Chemical Physics Letters. 393, 2004, pp. 256-259. DOI ScienceOn |
2 | Bian JM, Li XM, Gao XD, Yu WD, Appl Phys Lett. 84, 2004, pp. 541-543. |
3 | Young SJ, Ji LW, Fang TH, Chang SJ, Su YK, Du XL, Acta Mater . 55, 2007, pp. 329-333. DOI ScienceOn |
4 | Manoj Kumar, Sang-Kyun Kim, Se-Young Choi, Applied Surface Science. 256, 2009, pp. 1329-1332. DOI ScienceOn |
5 | S.Y. Liu, T. Chen, Y.L. Jiang, G.P. Ru, X.P. Qu, J . Appl. Phys.Vol.105, 2009.pp. 114504 DOI ScienceOn |
6 | W.I. Park, G.C. Yi, Adv. Mater . Vol. 16, 2004.pp. 87-90. DOI ScienceOn |
7 | Ya.I. Alivov, E.V. Kalinina, A.E. Cherenkov, D.C. Look, B.M. Ataev, A.K. Omaev, M.V. Chukichev, D.M. Bagnall, Appl. Phys. Lett. Volt. 83, 2003.pp. 4719. DOI ScienceOn |
8 | D.M. Nanditha, M. Dissanayake, R.A. Hatton, R.J. Curry, S.R.P. Silva, Appl. Phys. Lett. Vol. 90, 2007.pp.113505. DOI ScienceOn |
9 | I.S. Jeong, J.H. Kim, S. Im, Appl. Phys. Lett. Vol. 83, 2003.pp. 5313. DOI ScienceOn |
10 | Y.S. Choi, J.Y. Lee, S. Im, S.J. Lee, J . Vac. Sci. Technol. Vol. 20, 2002.pp. 2384. DOI ScienceOn |
11 | P.L. Chen, X.Y. Ma, D.R. Yang, J . Appl. Phys.101, 2007.pp. 053103. DOI ScienceOn |
12 | J.W. Sun, Y.M. Lu, Y.C. Liu, D.Z. Shen, Z.Z. Zhang, B.H. Li, J.Y. Zhang, B. Yao, D.X. Zhao, X.W. Fan, J . Appl. Phys. Vol. 41, 2008.pp.155103. |
13 | J.D. Ye, S.L. Gu, S.M. Zhu, W. Liu, S.M. Liu, R. Zhang, Y. Shi, Y.D. Zheng, Appl. Phys. Lett. Vol. 88, 2006.pp. 141918. DOI ScienceOn |
14 | Tao Chen, Shu-Yi Liu, Qi Xie, Christophe Detavernier, R. L. Van Meirhaeghe, Xin-Ping Qu, Appl. Phys A. Vol. 98, 2010.pp. 357-365 DOI |
15 | Chen LL, Ye ZZ, Lu JG, Chu PK, Control and improvement of p-type conductivity in indium and nitrogen codoped ZnO thin films, Appl Phys Lett. 89, 2006, pp.252113. DOI ScienceOn |
16 | Lung-Chien Chen and Chun-Nan Pan , P-ZnO/n-Si Photodiodes Prepared by Ultrasonic Spraying Pyrolysis Metho, The Open Crystallography Journal . 1,2008, pp. 10-13. DOI |
17 | Manoj Kumar, Sang-Kyun Kim, Se-Young Choi, Formation of Al-N co-doped p-ZnO/n-Si (1 0 0) heterojunction structure by RF co-sputtering technique, Applied Surface Science . 256, 2009, pp. 1329-1332. DOI ScienceOn |
18 | Manoj Kumar, Sang-Kyun Kim, Se-Young Choi, Applied Surface Science . Vol. 256, 2009, pp. 1329-1332. DOI ScienceOn |
19 | He Bo, Ma Zhong Quan, Xu Jing Yin Yan Ting, Materials Science in Semiconductor Processing.Vol.12, 2009, pp. 248-252 . DOI ScienceOn |
20 | J.D. Ye, S.L. Gu, S.M. Zhu, W. Liu, S.M. Liu, R. Zhang, et al., Appl. Phys. Lett. Vol. 88, 2006, pp.182112 DOI ScienceOn |