Thermal Decomposition of Tetrakis(ethylmethylamido) Titanium for Chemical Vapor Deposition of Titanium Nitride
![]() ![]() |
Kim, Seong-Jae
(Faculty of Applied Chemical Engineering and Research Institute for Catalysis, Chonnam National University)
Kim, Bo-Hye (Department of Korean Medicinal Supply, Dongshin University) Woo, Hee-Gweon (Department of Chemistry and Nanotechnology Research Center, Chonnam National University) Kim, Su-Kyung (Faculty of Applied Chemical Engineering and Research Institute for Catalysis, Chonnam National University) Kim, Do-Heyoung (Faculty of Applied Chemical Engineering and Research Institute for Catalysis, Chonnam National University) |
1 | Elam, J. W.; Schuisky, M.; Ferguson, J. D.; George, S. M. Thin Solid Films 2003, 436, 145 DOI ScienceOn |
2 | Cross, J. B.; Smith, S. M.; Schlegel, H. B. Chem. Mater. 2001, 13, 1095 DOI ScienceOn |
3 | Paranjpe, A.; Islamraja, M. J. Vac. Sci. Technol. 1995, B13, 2105 |
4 | Shin, H.-K.; Shin, H.-J.; Lee, J. G.; Gang, S. W. J. Chem. Mater. 1997, 9, 76 DOI ScienceOn |
5 | Kim, D. H.; Kim, J. J.; Park, J. W.; Kim, J. J. J. Electrochem. Soc. 1996, 143, L188 DOI |
6 | Kim, J. Y.; Seo, S.; Kim, D. Y.; Jeon, H.; Kim, Y. J. Vac. Sci. Technol. 2004, 22, 8 DOI ScienceOn |
7 | Intermann, A.; Koerner, H.; Koch, F. J. Electrochem. Soc. 1993, 140, 3215 DOI |
8 | Yun, J.-Y.; Rhee, S.-W. Korean J. of Chem. Eng. 1996, 13, 510 DOI |
9 | Yun, J.-Y.; Park, M.-Y.; Rhee, S.-W. J. Electrochem. Soc. 1998, 145, 2453 DOI |
10 | Driessen, J. P. A. M.; Schoonman, J.; Jensen, K. F. J. Electrochem. Soc. 2001, 148, G178 DOI ScienceOn |
11 | Yun, J.-Y.; Park, M.-Y.; Rhee, S.-W. J. Electrochem. Soc. 1999, 146, 1804 DOI ScienceOn |
12 | Yun, J.-H.; Park, M.-Y.; Rhee, S.-W. J. Vac. Sci. Technol. 1998, A16, 419 |
13 | Fogler, H. S. Element of Chemical Reaction Engineering; 2nd ed.; Prentice-Hall: Englewood Cliffs, NJ, 1992; p 11 |
14 | Silverstein, R. M.; Bassler, G. C.; Morrill, T. C. Spectroscopic Identification of Organic Compounds, 5th ed.; John Wiley & Sons, Inc.: New York, 1991; p 126 |
15 | Vab der Vis, M. G. M.; Konings, R. J. M.; Oskam, A.; Walter, R. J. Mol. Struct. 1994, 93, 323 |
16 | Weiller, B. H. J. Am. Chem. Soc. 1996, 118, 4975 DOI ScienceOn |
17 | Dubios, L. H.; Zegarski, B. R. J. Electrochem. Soc. 1992, 139, 3603 DOI |
18 | Kim, I. W.; Kim, S.-J.; Kim, D. H.; Woo, H.; Park, M.-Y.; Rhee, S.-W. Korean J. Chem. Eng. 2004, 21, 1256 DOI |
19 | Liu, X.; Wu, Z.; Cai, H.; Yang, Y.; Chen, T.; Vallet, C. E.; Zuhr, R. A.; Beach, D. B.; Peng, Z.-H.; Wu, Y.-D.; Concolino, T. E.; Rheingold, A. L.; Xue, Z. J. Am. Chem. Soc. 2001, 123, 8011 DOI ScienceOn |
![]() |