Browse > Article
http://dx.doi.org/10.17661/jkiiect.2020.13.5.412

A Stdudy on SUS MASK Etching using of FeCl3  

Lee, Woo-Sik (Department of Chemical & Biological Engineering, Gachon University)
Publication Information
The Journal of Korea Institute of Information, Electronics, and Communication Technology / v.13, no.5, 2020 , pp. 412-418 More about this Journal
Abstract
This paper produced an automatic fluid management system that can accurately control the specific gravity of etching solution(FeCl3), and produced a SUS MASK applied to OLED. The target was set at 0.4 mm in diameter of the hole. As a result of this misconception, the etching speed increased when the specific gravity(S.G) value of FeCl3 was changed from 1.43 to 1.49. And when the weight was 1.49, it was found that the vertical diameter was 0.405 mm, approaching the target. When pressure injection was varied from 2.0kg/cm2 to 3.5kg/cm2, the hole diameter at 3.0 kg/cm2 averaged 0.4mm, matching the target. The characteristics of the change in gravity were analyzed by applying the additive 1.2% and setting the weight at 1.430 by mixing HCl and H2O in FeCl3 and fixing the injection pressure at 3.0 kg/cm2. When the weight changed from 1.460 to 1.469 the etching speed increased from 0.564 to 0.540. When the weight was 1.467, the hole diameter was measured at 0.4 mm and the target was reached.
Keywords
etching speed; $ FeCl_3$; hydrochloric acid; OLED; SUS mask; specific gravity;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
연도 인용수 순위
1 M. M. Heravi, F. K. Behbahani, M. Daraie, H. A. Oskooie, "Fe(ClO4)3${\cdot}$ 6H2O: A mild and efficient catalyst for one-pot three component synthesis of ${\beta}$-acetamido carbonyl compounds under solvent-free conditions", Molecular Diversity, Vol. 13, No 3, pp.375-378. 2009   DOI
2 I. J. Park, B. Swanin, D. W. Kim, G. H. Kim, D. H. Han, H. C. Jung, "Preparation of mickel nanoparticles using nickel raffinate separated by solvent extraction from sepent FeCl3 etching solution arch", Metall. Mater, Vol. 64, No 2, pp. 531-534, 2019
3 E. Najafi and F. K. Behbahani, "Three Component Synthesis of 3-Diarylmethy indoles Using Fe(ClO4)3/SiO2 as Catalystl", ussian Journal of Organic Chemistry, Vol. 53, No. 3, pp.454-458, 2017
4 S. Tao, B. Wu, S. Lei, "A comparative study of the interaction between microhole sidewall and the plasma generated by nanosecond and femtosecond laser ablation of deep microholes", J. anuf. Process, Vol. 14, pp.233-242. 2012
5 W. T. Kwon, L. S. Kwon, W. S. Lee, "The Development of New Cost-Effective Optimization Technology for OLED Market Entry", Journal of Distribution Science Vol. 17, No. 4, pp.51-57, 2019   DOI
6 Y. W. Kim, M. R. Park, H. M. Lee, G. H. Park, C. H. Park, "Effect of Fe(ClO4)3 Addition in the Aqueous Ferric Chloride Etchant on the Increase of Shadow Mask Etch Rate", ,Korean Chem. Eng. Res, Vol. 48, No. 2, pp. 157-163, 2010
7 M. R. Park, Y. W. Kim, J. H. Park, C. H. Park, "Separation of Iron and Nickel from Heavily Concentrated Aqueous", Clean Tech., Vol. 13, No. 4, pp.274-280, 2007
8 D. W. Kim, I. J. Park, G. H. Kim, B. M. Chae, S. W. Lee, H. L. Choi, H. C. Jung, "Oxidation Process for the Etching Solution Regeneration of Ferric Chloride Using Liquid and Solid Oxidizing Agent", Clean Technol, Vol. 23, No. 2, pp.158-162, 2017   DOI
9 W. S. Choi, H. Y. Kim, J. W. Jeon, W. S. Chang, S. H. Cho, "Vibration-Assisted Femtosecond Laser Drilling with Controllable Taper Angles for AMOLED Fine Metal Mask Fabrication", Materials, Vol. 10, pp.212-220, 2017   DOI
10 Y. Ito, M. Ueki, T. Kizaki, N.S ugita, M. Mitsuishi, "Precision cutting of glass by laser-assisted machining", Procedia Manuf, Vol. 7, pp.240-245, 2016   DOI