Browse > Article
http://dx.doi.org/10.17661/jkiiect.2015.8.1.037

Programmed APTES and OTS Patterns for the Multi-Channel FET of Single-Walled Carbon Nanotubes  

Kim, Byung-Cheul (Department of Electronic Engineering, Gyeongnam National University of Science and Technology(GnTECH))
Kim, Joo-Yeon (School of Electrical Electronics Engineering, Ulsan College)
An, Ho-Myoung (Department of Electronics, Osan University)
Publication Information
The Journal of Korea Institute of Information, Electronics, and Communication Technology / v.8, no.1, 2015 , pp. 37-44 More about this Journal
Abstract
In this paper, we have investigated a selective assembly method of single-walled carbon nanotubes (SWCNTs) on a silicon substrate using only photolithographic process and then proposed a fabrication method of field effect transistors (FETs) using SWCNT-based patterns. The aminopropylethoxysilane (APTES) patterns, which are formed for positively charged surface molecular patterns, are utilized to assemble and align millions of SWCNTs and we can more effectively assemble on a silicon (Si) surface using this method than assembly processes using only the 1-octadecyltrichlorosilane (OTS). We investigated a selective assembly method of SWCNTs on a Si surface using surface-programmed APTES and OTS patterns and then a fabrication method of FETs. photoresist(PR) patterns were made using photolithographic process on the silicon dioxide (SiO2) grown Si substrate and the substrate was placed in the OTS solution (1:500 v/v in anhydrous hexane) to cover the bare SiO2 regions. After removing the PR, the substrate was placed in APTES solution to backfill the remaining SiO2 area. This surface-programmed substrate was placed into a SWCNT solution dispersed in dichlorobenzene. SWCNTs were attracted toward the positively charged molecular regions, and aligned along the APTES patterns. On the contrary, SWCNT were not assembled on the OTS patterns. In this process, positively charged surface molecular patterns are utilized to direct the assembly of negatively charged SWCNT on SiO2. As a result, the selectively assembled SWCNT channels can be obtained between two electrodes(source and drain electrodes). Finally, we can successfully fabricate SWCNT-based multi-channel FETs by using our self-assembled monolayer method.
Keywords
SWCNT; CNT; Multi-channel FET; APTES; OTS;
Citations & Related Records
연도 인용수 순위
  • Reference
1 M. Picher, P. A. Lin, J. L. Gomez-Ballesteros, P. B. Balbuena, and R. Sharma, "Nucleation of Graphene and Its Conversion to Single-Walled Carbon Nanotubes," Nano Letters, Vol. 14, No. 11, pp. 6104-6108, October, 2014.   DOI
2 S. Ghosh, A. K. Sood, and N. Kumar, "Carbon Nanotube Flow Sensors," Science, Vol. 299, No. 5609, pp. 1042-1044, February, 2003.   DOI
3 P. W. Barone, S. Baik, D. A. Heller, and M. S. Strano, "Near-infrared optical sensors based on single-walled carbon nanotubes," Nature Materials, Vol. 4, No. 1, pp. 86-92, January, 2005.   DOI
4 S. J. Tans, A. R. M. Verschueren, and C. Dekker, "Room-temperature transistor based on a single carbon nanotube," Nature, Vol. 393, No. 6680, pp. 49-52, May, 1998.   DOI
5 R. Martel, T. Schmidt, H. R. Shea, T. Hertel and Ph. Avouris, "Single- and multi-wall carbon nanotube field-effect transistors," Applied Physics Letters, Vol. 73, No. 17, pp. 2447-2449, October, 1998.   DOI
6 J. Gao, A. Yu, M. E. Itkis, E. Bekyarova, B Zhao, S. Niyogi, R. C. Haddon, "Large-Scale Fabrication of Aligned Single-Walled Carbon Nanotube Array and Hierarchical Single-Walled Carbon Nanotube Assembly," J. Am. Chem. Soc., Vol. 126, No. 51, pp. 16698-16699, December, 2004.   DOI
7 Y. Zhang, A. Chang, J. Cao, Q. Wang, W. Kim, Y. Li, N. Morris, E. Yenilmez, J. Kong, and H. Dai "Electric-field-directed growth of aligned single-walled carbon nanotubes," Applied Physics Letters, Vol. 79, No. 19, pp. 3155-3157, November, 2001.   DOI
8 S. J. Oh, J. Zhang, Y. Cheng, H. Shimoda, and O. Zhou, "Liquid-phase fabrication of patterned carbon nanotube field emission cathodes," Applied Physics Letters, Vol. 84, No. 19, 3738-3740, April 2004.   DOI
9 L. Zeng, N. Pattyn, and A. R. Barron, "Attachment of Functionalized Single-Walled Carbon Nanotubes (SWNTs) to Silicon Surfaces," Journal of Nanoscience and Nanotechnology, Vol. 8, No. 3, pp. 1545-1550(6) March, 2008.
10 R.A Synowicki, "Spectroscopic ellipsometry characterization of indium tin oxide film microstructure and optical constants," Thin Solid Films, Vol. 313-314, pp. 394-397 February, 1998.   DOI