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http://dx.doi.org/10.9797/TSISS.2014.10.1.023

Resonant Frequency Tuning of Torsional Microscanner using MEMS actuator  

Lee, Jae-Ik (School of Mechanical Engineering, Yonsei Univ.)
Park, Sunwoo (School of Mechanical Engineering, Yonsei Univ.)
Kim, Jongbaeg (School of Mechanical Engineering, Yonsei Univ.)
Publication Information
Transactions of the Society of Information Storage Systems / v.10, no.1, 2014 , pp. 23-26 More about this Journal
Abstract
In this paper, we present a novel approach for tuning the resonant frequency of torsionally driven vertical comb actuators. The tuning unit composed of thermal actuator, scissor mechanism and V-shape shaft enables continuous and reversible resonant frequency tuning. The proposed method is based on the stiffness alteration of the V-shape shaft. It is experimentally verified that the resonant frequency of the torsional microscanner is shifted up to 1.59 kHz from 1.51 kHz showing the maximum tuning ratio of 5.29%.
Keywords
Frequency tuning; Torsional microscanner; Vertical comb actuator; Shaft-widening;
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