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http://dx.doi.org/10.9797/TSISS.2012.8.1.006

Design Approach and Structural Analysis for Development of a Micro-Wear Tester  

Yoo, Shin-Sung (연세대학교 기계공학과)
Kim, Dae-Eun (연세대학교 기계공학과)
Publication Information
Transactions of the Society of Information Storage Systems / v.8, no.1, 2012 , pp. 6-10 More about this Journal
Abstract
The tribological behavior of microsystems needs to be clearly understood in order to improve the reliability of precision components. For example, friction and wear phenomena pose serious problems in MEMS applications. As a first step to investigate the tribological behavior of such systems, an appropriate testing system must be acquired. In this work, a micro-wear tester based MEMS platform was designed. The main concern was to achieve a desirable range of horizontal displacement for the specimen holder and also to apply a normal force in the tens of ${\mu}N$ range. The structural analysis of the micro-wear tester showed that the proposed design satisfied these requirements while maintaining the structural integrity.
Keywords
MEMS; micro wear tester; structural analysis; tribology;
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Times Cited By KSCI : 1  (Citation Analysis)
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