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http://dx.doi.org/10.9797/TSISS.2012.8.1.016

Calibration of SAW Based Capacitive Sensor Using Lumped Component and High Precision Gap Measurement  

Kim, Jae-Geun (연세대학교 기계공학과)
Ko, Byung-Han (연세대학교 기계공학과)
Park, Young-Pil (연세대학교 기계공학과)
Park, No-Cheol (연세대학교 기계공학과)
Publication Information
Transactions of the Society of Information Storage Systems / v.8, no.1, 2012 , pp. 16-21 More about this Journal
Abstract
SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.
Keywords
Surface acoustic wave; Capacitive sensor; Calibration; Gap measurement;
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Times Cited By KSCI : 1  (Citation Analysis)
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