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Feasibility study on realization of high resolution solid immersion lensbased near-field microscopy by use of an annular aperture  

Moon, H.B. (연세대학교 정보저장기기연구센터)
Yoon, Y.J. (연세대학교 정보저장기기연구센터)
Kim, T.S. (연세대학교 기계공학부)
Park, Y.P. (연세대학교 기계공학부)
Park, N.C. (연세대학교 기계공학부)
Park, K.S. (연세대학교 기계공학부)
Publication Information
Transactions of the Society of Information Storage Systems / v.6, no.2, 2010 , pp. 79-82 More about this Journal
Abstract
In optical imaging systems, such as microscopes, high resolution exposure systems, and optical storage devices, higher optical resolution is a requirement. One of the promising technologies that is able to satisfy this requirement with relatively simple construction and reliable performance are, solid immersion lens (SIL)-based near-field (NF) optical systems. High NA optical systems using annular apertures have been investigated as one solution to achieve higher resolutions and an extended focal depth. By applying an optimized annular aperture to convention SIL optical head resolution can be increased by approximately 20%. This novel SIL-based near-field optics will be verified through experiments such as measuring focused beam spot profiles and observing the topology of a measurement sample. The studied SIL-based near-field optics can be applicable to not only next generation optical storage device but also high resolution microscopy and pattering technologies.
Keywords
NF (near-field) optics; annular aperture; NF microscopy; optical filter;
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