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http://dx.doi.org/10.5369/JSST.2018.27.1.13

Synthesis of Nanoporous Metal Oxide Films Using Anodic Oxidation and Their Gas Sensing Properties  

Suh, Jun Min (Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National Unversity)
Kim, Do Hong (Department of Materials Science and Engineering, Korea University)
Jang, Ho Won (Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National Unversity)
Publication Information
Journal of Sensor Science and Technology / v.27, no.1, 2018 , pp. 13-20 More about this Journal
Abstract
Gas sensors based on metal oxide semiconductors are used in numerous applications including monitoring indoor air quality and detecting harmful substances like volatile organic compounds. Nanostructures, for example, nanoparticles, nanotubes, nanodomes, and nanofibers have been widely utilized to improve gas sensing properties of metal oxide semiconductors, and this increases the effective surface area, resulting in participation of more target gas molecules in the surface reaction. In the recent times, 1-dimensional (1D) metal oxide nanostructures fabricated using anodic oxidation have attracted great attention due to their high surface-to-volume ratio with large-area uniformity, reproducibility, and capability of synthesis under ambient air and pressure, leading to cost-effectiveness. Here, we provide a brief overview of 1D metal oxide nanostructures fabricated by anodic oxidation and their gas sensing properties. In addition, recent progress on thin film-based anodic oxidation for application in gas sensors is introduced.
Keywords
Gas sensor; Metal oxides; Anodic oxidation; Nanoporous; Nanotube;
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