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http://dx.doi.org/10.5369/JSST.2013.22.6.428

Performance Improvement of Peristaltic Micropump Using Various Actuating Signal  

Hong, Pyo-Hwan (Shool of Electronics Engineering, Kyungpook National University)
Jung, Dong-Geon (Shool of Electronics Engineering, Kyungpook National University)
Pyo, Dae-Seong (Shool of Electronics Engineering, Kyungpook National University)
Lee, Jong-Hyun (Shool of Electronics Engineering, Kyungpook National University)
Cho, Chan-Seob (Shool of Electrical Engineering, Kyungpook National University)
Kim, Bonghwan (Department of Electronics Engineering, Catholic University of Daegu)
Publication Information
Journal of Sensor Science and Technology / v.22, no.6, 2013 , pp. 428-432 More about this Journal
Abstract
This paper described the development of electrostatically driven peristaltic micropump. The proposed micropump consists of a flexible membrane and a single chamber which electrodes are inserted. The single chamber is divided into smaller cells by the electrodes. The fabricated micropump was operated with four electrodes in the membrane and a various phase sequencing actuation. We studied the changes in the flow rate corresponding to the actuating signal applied to the micropump under the zero hydraulic pressure difference between lnlet port and outlet port. The pump was operated from 60 to 130 V. Whereas the maximum flow rate in basic actuating signal is about 83 ${\mu}1/min$ at 15 Hz, the maximum flow rate in optimized actuating signal is about 114 ${\mu}l/min$ at 10 Hz.
Keywords
uTAS; Micropump; Peristaltic motion; Electrostatic force;
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