Browse > Article
http://dx.doi.org/10.5369/JSST.2010.19.2.092

Optimization of a capacitive sensor for high dynamic range  

Kang, Dae-Sil (Vibration and Acoustic Transducers Lab, POSTECH)
Kim, Moo-Jin (Samsung Electronics)
Moon, Won-Kyu (Vibration and Acoustic Transducers Lab, POSTECH)
Publication Information
Journal of Sensor Science and Technology / v.19, no.2, 2010 , pp. 92-98 More about this Journal
Abstract
The capacitive sensor has a simple structure, compact size and low cost, but a small dynamic range. The small range is caused by use of gap variation. If the sensor takes area variation type with one plate moving horizontally, it can have a large measurable range. While the area variation has relatively low sensitivity, some studies have found methods to improve the sensitivity. Even though the methods are effective, parameters of the results are limited and 2 dimensional. This study provides more practical and 3 dimensional analysis and suggests relations between parameters. Using the results, the optimized design parameters of a high dynamic range capacitive sensor can be found.
Keywords
capacitive sensor; high dynamic range; sensor design;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Kim M and Moon W, "A new linear encoder-like capacitive displacement sensor", Measurement, vol. 39, pp. 481-489, 2006.   DOI   ScienceOn
2 Zhu F and J.W.Spronck, "A simple capacitive displacement sensor", Sensors and Actuators A, vol. 25-27, pp. 265-269, 1991.
3 Hirasawa M, Nakamura M, and Kanno M, "Optimum from of capacitive transducer for displacement measurement", IEEE Transactions on Instrumentation and Measurement, vol. IM-33, pp. 276-280, 1984.
4 A.A. Arkadan, S. Subramaniam, Sivanesan, and O. Douedari, "Design optimization of a capacitive transducer for displacement measurement", IEEE Transactions on magnetics, vol. 35, pp. 1869-1872, 1999.   DOI   ScienceOn
5 Heerens WC, "Application of capacitance techniques in sensor design", J. Physics E: Scientific Instruments, vol. 19, pp. 897-906, 1986.   DOI   ScienceOn
6 KLAASSEN KB and PEPPEN JCLV, “Linear capacitive microdisplacement transduction using phase read-out”, Sensors and Actuators, vol. 3, pp. 209-220, 1982/83.   DOI   ScienceOn
7 Kim M and Moon W, "A new capacitive displacement sensor for high accuracy and long range", J. Kor. Sensors Soc., vol. 14, pp. pp.219-224, 2005.   과학기술학회마을   DOI   ScienceOn
8 Xiang Y, "The electrostatic capacitance of an inclined plate capacitor", J. Electrostatics, vol. 64, pp. 29-34, 2006.   DOI   ScienceOn
9 Homentcovschi D, "Electrostatic field of a system of aligned electrodes", J. Electrostatics, vol. 26, pp. 187-200, 1991.   DOI   ScienceOn
10 Kim M, Moon W, Yoon E, and Lee K-R, "A new capacitive displacement sensor with high accuracy and long-range", Sensors and Actuators A, vol. 103-131, pp. 135-141, 2006.   DOI   ScienceOn
11 Wolfendale PCF, "Capacitive displacement transducers with high accuracy and resolution", J. Physics E : Scientific Instruments, vol. 1, pp. 817-818, 1968.   DOI   ScienceOn
12 "Metrology". wikipedia.
13 PI. "Capacitive position sensors - nanometrology solutions". In: Physikinstrunmente, editor: Physikinstrunmente, 2009.
14 Kim JY, Lee, LD, Park KH, Ma SD, and Yang DJ, "Precision in situ measurement using non-contacting capacitive sensor with 4-electrodes", J. the Kor. Soc. of Precision Engineering, vol. 19, pp. 33-38, 2002.
15 ITRS. "International technology roadmap for semiconductors", 2005.
16 ITRS. "Advantages and challenges associated with the introduction of 450 mm wafers", ITRS, 2005.