Characteristics silicon pressure sensor using dry etching technology
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Woo, Dong-Kyun
(Andong National University)
Lee, Kyung-Il (Research Institute of Industrial Science & Technology) Kim, Heung-Rak (Research Institute of Industrial Science & Technology) Suh, Ho-Cheol (SEJONG industrial CO.LTD) Lee, Young-Tae (Andong National University) |
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