Browse > Article
http://dx.doi.org/10.5369/JSST.2009.18.3.217

Solid state gas sensors: improvement through material engineering  

Han, Sang-Do (Korea Institute of Energy Research)
Korotcenkov, Ghenadii (Gwangju Institute of Science and Technology)
Gwak, Ji-Hye (Korea Institute of Energy Research)
Publication Information
Journal of Sensor Science and Technology / v.18, no.3, 2009 , pp. 217-221 More about this Journal
Abstract
Different methods of material engineering, used for improvement of solid state gas sensors parameters are reviewed in this report. The wide possibilities of material engineering in optimization of gas sensing properties were demonstrated on the example of $SnO_2,\;TiO_2\;and\;In_2O_3$-based sensors.
Keywords
gas sensors; metal oxides; $SnO_2$; $In_2O_3$; $TiO_2$ material engineering; optimization;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 D.U. Hong, C.H. Han, S.D. Han, J. Gwak and S.Y. Lee, 'Catalytic combustion type hydrogen gas sensor using $TiO_2$ and UV LED', J. Kor. Sensors Soc., vol. 16, no. 1, pp. 7-10, 2007   DOI
2 V. Brinzari, G. Korotcenkov and V. Golovanov, 'Factors influencing the gas sensing characteristics of tin dioxide films deposited by spray pyrolysis: understanding and possibilities of control', Thin Solid Films, vol. 391, no. 2, pp. 167-175, 2001   DOI   ScienceOn
3 K.D. Schierbaum, 'Engineering of oxide surfaces and metal/oxide interfaces for chemical sensors: recent trends', Sens. Actuators B, vol. 24, no. 1-3, pp. 239-247, 1995   DOI   ScienceOn
4 G. Korotcenkov, 'Gas response control through structural and chemical modification of metal oxide films: state of the art and approaches', Sens. Actuators B, vol. 107, no. 1, pp. 209-232, 2005   DOI   ScienceOn
5 N. Barsan, M. Schweizer-Berberich and W. Gopel, 'Fundamental and practical aspects in the design of nanoscaled $SnO_2$ gas sensors: a status report', J. Anal. Chem., vol. 365, no. 4, pp. 287-304, 1999   DOI   ScienceOn
6 G. Korotcenkov, 'The role of morphology and crystallographic structure of metal oxides in response of conductometric-type gas sensors', Mater. Sci. Eng. R, vol. 61 no. 1-6, pp. 1-39, 2008   DOI   ScienceOn
7 G. Korotcenkov, 'Metal oxides for solid-state gas sensors: What determines our choice?', Mater. Sci. Eng. B, vol. 139, no.1, pp. 1-23, 2007   DOI   ScienceOn
8 G. Korotcenkov, V. Brinzari, J.R. Stetter, I. Blinov and V. Blaja, 'The nature of processes controlling the kinetics of indium oxide-based thin film gas sensor response', Sens Actuators B, vol. 128, no. 1, pp. 51-63, 2007   DOI   ScienceOn
9 M.O. Park, S.D. Choi, B.K. Min and J.W. Lim, 'Long-term stabilized metal oxide-doped $SnO_2$ sensors', J. Kor. Sensors Soc., vol. 17, no. 4, pp. 295-302, 2008   DOI
10 H.G. Moon, S.J. Yoon, H.H. Park and J.S. Kim, 'Growth mechanism of three dimensionally structured $TiO_2$ thin film for gas sensors', J. Kor. Sensors Soc., vol. 18, no. 2, pp. 110-115, 2009   과학기술학회마을   DOI
11 I.J. Kim, S.D. Han, C.H. Han, J. Gwak, D.U. Hong, D. Jakhar, K.C. Singh and J.S. Wang, 'Development of micro hydrogen gas sensor with $SnO_2$-36 $Ag_2O-PtO_x$ composite using MEMS process', Sens. Actuatores B, vol. 127, no. 2, pp. 441-446, 2007   DOI   ScienceOn
12 N. Yamazoe, 'New approaches for improving semiconductor gas sensors', Sens. Actuators B, vol. 5, no. 1-4, pp. 7-19, 1991   DOI   ScienceOn
13 D.E. Williams, 'Semiconducting oxides as gas-sensitive resistors', Sens. Actuators B, vol. 57, no. 1-3, pp. 1-16, 1999   DOI   ScienceOn
14 G. Korotcenkov, V. Brinzari, A. Cerneavschi, M. Ivanov, V. Golovanov, A. Cornet, J. Morante, A. Cabot and J. Arbiol, 'The influence of film structure on $In_2O_3$ gas response', Thin Solid Films, vol. 460, no. 1-2, pp. 315-323, 2004   DOI   ScienceOn
15 G. Korotcenkov, V. Brinzari, M. Ivanov, A. Cerneavschi, J. Rodriguez, A. Cirera, A. Cornet and J. Morante, 'Structural stability of indium oxide films deposited by spray pyrolysis during thermal annealing', Thin Solid Films, vol. 479, no. 1-2, pp. 38-51, 2005   DOI   ScienceOn
16 G. Korotcenkov and J.R. Stetter, 'Comparative study of $SnO_2$- and $In_2O_3$- based ozone sensors', ECS Transactions, vol. 6, no. 20, pp. 29-41, 2008
17 C.H. Han, D.W. Hong, I.J. Kim, J. Gwak, S.D. Han and K.C. Singh, 'Synthesis of Pd or Pt/titanate nanotube and its application to catalytic type hydrogen gas sensor', Sens. Actuators B, vol. 128, no. 1, pp. 320-325, 2007   DOI   ScienceOn
18 G. Korotcenkov, V. Brinzari, Y. Boris, M. Ivanov, J. Schwank and J. Morante, 'Influence of surface Pd doping on gas sensing characteristics of $SnO_2$ thin films deposited by spray pirolysis', Thin Solid Films, vol. 436, no. 1, pp. 119-126, 2003   DOI   ScienceOn
19 I.J. Kim, S.D. Han, C.H. Han, J. Gwak, H.D. Lee and J.S. Wang, 'Micro semiconductor CO sensors based on indium-doped tin dioxide nanocrystalline powders', Sensors, vol. 6, no. 5, pp. 526-535, 2006   DOI
20 G. Korotcenkov, V. Brinzari and I. Boris, '(Cu, Fe, Co or Ni)-doped $SnO_2$ films deposited by spray pyrolysis: Doping influence on film morphology', J. Mater. Sci., vol. 43, no. 8, pp. 2761-2770, 2008   DOI   ScienceOn
21 V. Brinzari, G. Korotcenkov, V. Golovanov, J. Schwank, V. Lantto and S. Saukko, 'Morphological rank of nano-scale tin dioxide films deposited by spray pyrolysis from $SnCl_4{\cdot}5H_2O$ water solution', Thin Solid Films, vol. 408, no. 1-2, pp. 51-58, 2002   DOI   ScienceOn
22 D. Kohl, 'The role of noble metals in the chemistry of solid-state gas sensors', Sens. Actuators B, vol. 1, no. 1-6, pp. 158-165, 1990   DOI   ScienceOn
23 G. Korotcenkov, A. Cornet, E. Rossinyol, J. Arbiol, V. Brinzari and Y. Blinov, 'Faceting characterization of tin dioxide nanocrystals deposited by spray pyrolysis from stannic chloride water solution', Thin Solid Films, vol. 471, no. 1-2, pp. 310-319, 2005   DOI   ScienceOn
24 G. Korotcenkov, 'Practical aspects in design of oneelectrode semiconductor gas sensors: Status report', Sens. Actuators B, vol. 121, no. 2, pp. 664-678, 2007   DOI   ScienceOn
25 G. Korotcenkov, V. Macsanov, V. Tolstoy, V. Brinzari, J. Schwank and G. Faglia, 'Structural and gas response characterization of nano-size $SnO_2$ films deposited by SILD method', Sens. Actuators B, vol. 96, no. 3, pp. 602-609, 2003   DOI   ScienceOn
26 C. Pijolat, J.P. Viricelle, G. Tournier and P. Montmeat, 'Application of membranes and filtering films for gas sensors improvements', Thin Solid Films, vol. 490, no. 1, pp. 7-16, 2005   DOI   ScienceOn
27 H. Yamaura, K. Moriya, N. Miura and N. Yamazoe, 'Mechanism of sensitivity promotion in CO sensor using indium oxide and cobalt oxide', Sens. Actuators B, vol. 65, no. 1-3, pp. 39-41, 2000   DOI   ScienceOn
28 G. Sberveglieri, 'Recent developments in semiconducting thin-film gas sensors', Sens. Actuators B, vol. 23, no. 2-3, pp. 103-109, 1995   DOI   ScienceOn
29 G. Korotcenkov, I. Blinov, V. Brinzari and J.R. Stetter, 'Effect of air humidity on gas response of $SnO_2$ thin film ozone sensors', Sens. Actuators B, vol. 122, no. 2, pp. 519.-526, 2007   DOI   ScienceOn
30 C.-H. Han S.-D. Han and S.P. Khatkar, 'Enhancement of $H_2$-sensing properties of F-doped $SnO_2$ sensor by surface modification with $SiO_2$', Sensors, vol. 6, no. 5, pp. 492-502, 2006   DOI