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http://dx.doi.org/10.5369/JSST.2008.17.1.075

Structure optimization and characterization of a microbolometer for a CO2 detector  

Seo, Ho-Won (Nano Bio Research Center, Korea Institute of Science and Technology)
Kim, Tae-Geun (School of Electronics & Engineering, Korea University)
Moon, Sung (Nano Bio Research Center, Korea Institute of Science and Technology)
Publication Information
Journal of Sensor Science and Technology / v.17, no.1, 2008 , pp. 75-80 More about this Journal
Abstract
In this work, we optimized a microbolometer for application of a $CO_2$ detector by using MEMS technology. We fabricated a stable thermal isolation structure by varying the lengths of supporting legs which affect bolometer performance. We could fabricate more stable thermal isolation structure for the microbolometer through the results of ANSYS simulations, and minimize the fabrication processes by using bulk micromachining to use a $CO_2$ detector. The microbolometer shows a detectivity of $2.5{\times}109$ cmHz$^{1/2}$/W at a chopper frequency of 8 Hz and a bias current of $6.25\;{\mu}A$ with a vacuum package of about $3.0{\times}10.3$ torr. Therefore, we put to conclusion that the microbolometer optimized in this experiment could be useful for the application of a $CO_2$ detector.
Keywords
MEMS; microbolometer; infrared; detector; carbon dioxide;
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