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http://dx.doi.org/10.5369/JSST.2006.15.6.457

The sensing characteristics of MOPS structure based on porous silicon for ethanol gas  

Sohn, Sihn-Young (Department of Physics, Kongju National University)
Kim, Han-Jung (Department of Physics, Kongju National University)
Lee, Ki-Won (Department of Physics, Kongju National University)
Kim, Young-You (Department of Physics, Kongju National University)
Publication Information
Journal of Sensor Science and Technology / v.15, no.6, 2006 , pp. 457-461 More about this Journal
Abstract
To use the porous silicon as gas sensors, we made the MOPS structure from the porous silicon with Al evaporation and investigated the sensing characteristic of ethanol. When the MOPS structure is in contact with ethanol gas, the maximum peak of PL changes and it return to original intensity without contact. The MOPS structure had response time 0.78s and recovery time 4.13s when it is in contact with ethanol, which satisfied the required sensor standards. Further complimentary researches, however, are required to investigate the contact mechanism between MOPS structure and ethanol and to solve the surface contamination problem.
Keywords
porous silicon; metal-oxide-porous silicon structure; photoluminescence; response characteristics; ethanol sensor;
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