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http://dx.doi.org/10.5369/JSST.2006.15.1.007

Fabrication of a multi-functional one-chip sensor for detecting water depth, temperature, and conductivity  

Song, Nak-Chun (Department of Electronics, Kyungpook National University)
Cho, Yong-Soo (Department of Electronics, Kyungpook National University)
Choi, Sie-Young (Department of Electronics, Kyungpook National University)
Publication Information
Journal of Sensor Science and Technology / v.15, no.1, 2006 , pp. 7-12 More about this Journal
Abstract
The multi-functional one-chip sensor has been fabricated to reduce output variation under various water environment. There were a temperature sensor, a piezoresistive type pressure sensor, and a electrode type conductivity sensor in the fabricated one-chip sensor. This sensor was measured water depth in the range of $0{\sim}180cm$, temperature in the range of $0{\sim}50^{\circ}C$, and salinity in the range of 0 $0wt%{\sim}5wt%$, respectively. Since the change of water depth in solution environment depends on various factors such as salinity, latitude, temperature, and atmospheric pressure, the water depth sensor is needed to be compensated. We tried to compensate the salinity and temperature dependence for the pressure in water by using lookup-table method.
Keywords
water depth sensor; temperature sensor; conductivity; MEMS; pressure sensor;
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