A New Organic Modifiers for Anti-Stiction
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Kim, Bong-Hwan
(School of Electrical Engineering, Seoul National University)
Chun, Kuk-Jin (School of Electrical Engineering, Seoul National University) Lee, Yoon-Sik (School of Chemical Engineering, Seoul National University) |
1 |
Self-assembled monolayer films as durable antistiction coatings for polysilicon microstructures
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2 |
A New Class of Surface Modification for Stiction Reduction
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3 |
A Stiction Model of Suspended Polysilicon Microstructure Including Residual Stress Gradient and Postrelease Temperature
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DOI ScienceOn |
4 |
A new class of surface modi-fiers for stiction reduction
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5 |
Alkyltrichlo-rosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
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DOI ScienceOn |
6 |
Dry Release for Surface Micromachining with HF Vapor-Phase Etching
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DOI ScienceOn |
7 |
Lubrication of silicon micromechanisms by chemical grafting of long-chain molecules
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DOI ScienceOn |
8 |
Adsorption of perfluorinated n-alkanoic acids on native alumium oxide surface
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DOI ScienceOn |
9 |
Elimination of Post-Release Adhesion in Microstructures Using Conformal Fluorocarbon Coatings
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DOI ScienceOn |
10 |
Stability of ammonium fluoride-treated Si(100)
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DOI ScienceOn |
11 |
Polysilicon surface-modification technique to reduce sticking of microstructures
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12 |
Critical Review: Adhesion in surface micromechanical structures
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13 |
Supercritical Carbon Dioxide Drying of Microstructures
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14 |
A Novel Resonant Accelerometer: Variable Electrostatic Stiffness Type
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