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A Study on the Removal of Electrostatic using Transmitted Ions Generated Soft X-ray with Compressed Air  

Kwon, Sung-Yul (Department of Safety Engineering, Graduate School, Pukyong National University)
Lee, Dong-Hoon (Division of Safety Engineering, Pukyong National University)
Choi, Jae-Wook (Division of Safety Engineering, Pukyong National University)
Seo, Min-Seok (Department of Safety Engineering, Graduate School, Pukyong National University)
Publication Information
Journal of the Korean Society of Safety / v.25, no.1, 2010 , pp. 27-31 More about this Journal
Abstract
It is a well known fact that the LCD and Semiconductor Devices are a central part of IT industry which is important in the present and the future. But the biggest problem of Semiconductor and LCD manufacturing is maintaining a cleaning room environment. For this reason, the soft X-ray type Ionizer was used as the electrostatic reducer device, which protects damage of the product against electrostatic discharge in the manufacturing process. Therefore it is a essential important factor during Semiconductor and LCD production process. But the soft X-ray has a intrinsic problem with harmful to human being in case of soft X-ray exposure. That's reason we have the research to solve above problem and made an apparatus that it was covered with shielding structure to protect X-ray radiation to outside. And besides, it has a possibility to eliminate the charged electrostatic in the narrow space through the slot for Ion emissions with dual soft X-ray sources on the both side. It is also not make the particles from itself when it has been operated.
Keywords
LCD and semiconductor; soft X-ray ionizer; electrostatic reducer; ion emission;
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