A Study of Data correction method when in-situ end point detection in Chemical-Mechanical Polishing of Copper Overlay
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Kim, Nam-Woo
(Department of Electronic Engineering, Mokwon University)
Hur, Chang-Wu (Department of Electronic Engineering, Mokwon University) |
1 | Department of Mechanical Engineering, Hannam University [Online]. http://me.hannam.ac.kr/text/15622/%B9%DD%B5%B5%C3%BC%C1%A6%C1%B6%B0%F8%C1%A47B.ppt 2 |
2 | Pusan National University CMP LAB. http://www.materic.or.kr/community/lab/content.asp?p_id=229&page=16&s_code=&s_kinds=&s_word=&s_name=&f_code= |
3 | Seoul National University Brain-Computer Interface, Rehabilltation, MEG, EEG, EMG signal Processing Lab. [Online]. http://coolstu.blog.me/130115108264 |
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