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http://dx.doi.org/10.6109/jkiice.2010.14.9.2065

Study on the Characteristic due to the Various Polarity based on the Carbon Contents in Organic Thin Film  

Oh, Teresa (청주대학교 반도체설계공학과)
Publication Information
Journal of the Korea Institute of Information and Communication Engineering / v.14, no.9, 2010 , pp. 2065-2070 More about this Journal
Abstract
The diluted PMMA treated $SiO_2$ films as an passivation materials for semiconductor devices was researched by using the FTIR spectra. The diluted PMMA solution with various ratios changed the surface of $SiO_2$ film as the hydrophilic, hydrophobic or hybrid type properties. The sample 7 with little carbon content showed dramatically the chemical variation by the FTIR spectra analysis. Beacuse the little carbon with electrons decreased the polarity and surface energy on the $SiO_2$ film, and then became a stable bonding structure and decreased the leakage current. The FTIR spectra can define the detail variation due to the chemical reaction on the organic thin film, and help to research the characteristic of the organic materials.
Keywords
Polarity; FTIR analysis; Si-O bond; PMMA; Carbon content;
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Times Cited By KSCI : 1  (Citation Analysis)
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