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The Area Segmentation Pattern Matching for COG Chip Alignment  

KIM EUNSEOK (아주대학교)
WANG GI-NAM (아주대학교)
Publication Information
Journal of the Korea Institute of Information and Communication Engineering / v.9, no.6, 2005 , pp. 1282-1287 More about this Journal
Abstract
The accuracy of chip alignment in inferior product inspection of COG(Chip On Glass) to be measured a few micro unit is very important role since the accuracy of chip inspection depends on chip alignment. In this paper, we propose the area segmentation pattern matching method to enhance the accuracy of chip alignment. The area segmentation pattern matching method compares, and matches correlation coefficients between the characteristic features within the detailed area and the areas. The three areas of pattern circumference are learned to minimize the matching error by bad pattern. The proposed method has advantage such as reduction of matching time, and enhanced accuracy since the characteristic features are searched within the segmented area.
Keywords
pattern matching; alignment; characteristic features; correlation;
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Times Cited By KSCI : 1  (Citation Analysis)
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