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Low Actuation Voltage RF MEMS Switch  

서용교 (삼성종합기술원)
최영식 (부경대학교 전자컴퓨터정보통신 공학부)
Publication Information
Journal of the Korea Institute of Information and Communication Engineering / v.7, no.5, 2003 , pp. 1038-1043 More about this Journal
Abstract
A capacitive-coupled configuration MEMS switch is designed and fabricated, and its characteristics are measured. Low actuation voltage has been achieved by means of small distance between signal line and membrane. Minimum actuation voltage is about 11V. Isolation is around 40dB and insertion loss is about 0.2dB at 2GHz.
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