Browse > Article

Experimental Study on Wet Thermal and PECVD Oxides for GOI Fabrication  

Byun, Young-Tae (Photonics Research Center Korea Institute of Science and Technology)
Jhon, Young-Min (Photonics Research Center Korea Institute of Science and Technology)
Kim, Sun-Ho (Photonics Research Center Korea Institute of Science and Technology)
Publication Information
New Physics: Sae Mulli / v.51, no.3, 2005 , pp. 254-259 More about this Journal
Keywords
GaAs-on-insulator (GOI); Thermal oxide; PECVD oxide; Thermal expansion coefficient;
Citations & Related Records
연도 인용수 순위
  • Reference
1 E. Jalaguier, B. Aspar, S. Pocas, J. F. Michaud, M. Zussy, A. M. Papon and M. Bruel, Electron. Lett. 34, 408 (1998)   DOI   ScienceOn
2 F. Li, M. K. Balazs and B. E. Deal, Solid State Technol. 43, 87 (2000)   DOI   ScienceOn
3 Q. Lai, P. Pliska, J. Schmid, W. Hunziker and H. Melchior, Electron. Lett. 29, 714 (1993)   DOI   ScienceOn
4 C. H. Kong, K. Kondo, J. Lagowski and H. C. Gatos, J. Electrochem. Soc. 134, 1261 (1987)   DOI   ScienceOn
5 Y. S. Wu, R. S. Feigelson, R. K. Route, D. Zheng, L. A. Gordon, M. M. Fejer and R. L. Byer, J. Appl. Phys. 83, 5552 (1998)   DOI   ScienceOn
6 J. M. London, A. H. Loomis, J. F. Ahadian and C. G. Fonstad, Jr. IEEE Photon. Technol. Lett. 11, 958 (1999)   DOI   ScienceOn
7 Shinpei Ogawa, Masahiro Imada and Susumu Nodab, Appl. Phys. Lett. 82, 3406 (2003)   DOI   ScienceOn
8 Young Tae Byun, Kyung Hyun Park, Sun Ho Kim, Sang Sam Choi, Jong Chang Yi and Tong Kun Lim, Appl. Opt. 37, 496 (1998)   DOI   ScienceOn
9 Young Tae Byun and Hyoung Kwon Kim, Sae Muli 46, 297 (2003)
10 E. Jalaguier, B. Aspar, S. Pocas, J. F. Michaud, A. M. Papon and M. Bruel, in Proceedings of the 11th International Conference on Indium Phosphide and Related Materials (Davos, Switzerland, 1999), p. 26
11 P. Kopperschmidt, S. Senz, G. Kastner, D. Hesse and U. M. Gosele, Appl. Phys. Lett. 72, 3181 (1998)   DOI   ScienceOn
12 J. L. Pelloie, C. Raynaud, O. Faynot, A. Groullet and J. Du Port de Pontcharra, Microelectron. Eng. 48, 327 (1999)   DOI   ScienceOn
13 L. Di Cioccio, Y. Letiec, F. Letertre, C. Jaussaud and M. Bruel, Electron. Lett. 32, 1144 (1996)   DOI   ScienceOn
14 M. Bruel, Electron. Lett., 31, 1201 (1995)   DOI   ScienceOn
15 P. J. McMarr, B. J. Mrstik, R. K. Lawrence and G. G. Jernigan, IEEE Trans. Nucl. Sci. 44, 2115 (1997)   DOI   ScienceOn