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Study on the Characteristics of the Hybrid Parylene Thin Films  

Cha, Gook-Chan (Korea Orthophedics & Rehabilitation Engineering Center (KOREC))
Lee, Ji-Yeon (Korea Orthophedics & Rehabilitation Engineering Center (KOREC))
Jung, Seong-Hee (Korea Orthophedics & Rehabilitation Engineering Center (KOREC))
Song, Jeom-Sik (Korea Orthophedics & Rehabilitation Engineering Center (KOREC))
Lee, Suk-Min (Korea Orthophedics & Rehabilitation Engineering Center (KOREC))
Publication Information
Elastomers and Composites / v.45, no.4, 2010 , pp. 298-308 More about this Journal
Abstract
The mechanical properties and surface characteristics of parylene thin film were improved using Xylydene-based dimers (DPX-C, DPX-D, and DPX-N). A single-parylene-C, D, N film and a hybrid chemical and physical parylene thin films in which two types are mixed were manufactured for each dimer by adjusting the deposition conditions and the thickness of the thin film by input. Parylene was deposited by chemical vapor deposition (CVD) and the thermal characteristics of the single thin film and the hybrid thin film were compared by thermal analysis. The mechanical properties of the thin films were characterized by tensile strength, elongation, and tear force tests, and the surface characteristics of the thin films were evaluated by contact angle and surface energy measurements. The hybrid chemical parylene thin film in which two types are mixed can complement the strengths and weaknesses of the different dimers, while the physical parylene thin film can freely adjust the thin film characteristics of the coated surface and the opposite surface.
Keywords
parylene; film; CVD; hybrid;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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