Fabrication of Superjunction Trench Gate Power MOSFETs Using BSG-Doped Deep Trench of p-Pillar |
Kim, Sang Gi
(Components & Materials Research Laboratory, ETRI)
Park, Hoon Soo (Division of Green Energy Engineering, Uiduk University) Na, Kyoung Il (Components & Materials Research Laboratory, ETRI) Yoo, Seong Wook (Components & Materials Research Laboratory, ETRI) Won, Jongil (Components & Materials Research Laboratory, ETRI) Koo, Jin Gun (Components & Materials Research Laboratory, ETRI) Chai, Sang Hoon (Department of Electronic Engineering, Hoseo University) Park, Hyung-Moo (Division of Electronics and Electrical Engineering, Dongguk University) Yang, Yil Suk (Components & Materials Research Laboratory, ETRI) Lee, Jin Ho (Components & Materials Research Laboratory, ETRI) |
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