Simulation and Fabrication Studies of Semi-superjunction Trench Power MOSFETs by RSO Process with Silicon Nitride Layer
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Na, Kyoung Il
(Convergence Components & Materials Research Laboratory, ETRI)
Kim, Sang Gi (Convergence Components & Materials Research Laboratory, ETRI) Koo, Jin Gun (Convergence Components & Materials Research Laboratory, ETRI) Kim, Jong Dae (Convergence Components & Materials Research Laboratory, ETRI) Yang, Yil Suk (Convergence Components & Materials Research Laboratory, ETRI) Lee, Jin Ho (Convergence Components & Materials Research Laboratory, ETRI) |
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