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Adsorption Measurement of Thin Film Using a Quartz Crystal Resonator  

Kim, Byoung Chul (Department of Chem. Eng., Dong-A Univ.)
Park, Jung Woo (Department of Chem. Eng., Dong-A Univ.)
Kim, Young Han (Department of Chem. Eng., Dong-A Univ.)
Publication Information
Korean Chemical Engineering Research / v.48, no.3, 2010 , pp. 405-408 More about this Journal
Abstract
A technique to measure the adsorption characteristic of surface area and pore size of a ceramic thin film is proposed, and its performance is examine. The thin film is fabricated directly on the resonator surface to measure the adsorption capacity of the film as it is, and using carbon dioxide makes the measurement easy. The results indicates that the measured surface area is satisfactory, while the pore size has some error. It is suggested that readily available carbon dioxide can be used to determine adsorption capacity of thin film at room temperature.
Keywords
Adsorption Characteristic Determination; Quartz Crystal Resonator; TEOS;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 Choi, K. J., Kim, Y. H., Chang, S. M., Egawa, A. and Muramatsu, H., "Characterization of Aluminum Corrosion with a Quartz Crystal Analyzer," Anal. Chim. Acta., 386, 229-236(1999).   DOI   ScienceOn
2 Kim, B. C. and Kim, Y. H., "Sensitivity Determination of a Quartz Crystal Resonator for Practical Materials," Japanese J. Appl. Phys., 46, 7490-7495(2007).   DOI
3 Maeda, K., Kim, B. C., Kim, Y. H. and Fukui, K., "Nucleation Monitoring in Cooling Crystallization with a Quartz Crystal Oscillator," Anal. Chim. Acta, 558, 337-344(2006).   DOI   ScienceOn
4 He, W., Liu, Z. X., Du, X. S., Jiang, Y. D. and Xiao, D., "Analytical Application of Poly{methyl[3-(2-hydroxy-3,4-difluoro)phenyl] propyl siloxane} as a QCM Coating for DMMP Detection," Talanta, 76, 698-702(2008).   DOI   ScienceOn
5 Park, Y. M., Kim, Y. H. and Yamamoto, T., "Determination of Dye Concentration in Water Using Mesoporous Particle Coated QCR Sensors," Sens. Actuators B: Chem., 125, 468-473(2007).   DOI   ScienceOn
6 Joung, O. J. and Kim, Y. H., "Dew Point Measurement for Organic Vapor Mixture Using a Quartz Crystal Sensor," Sens. Actuators B: Chem., 113, 335-340(2006).   DOI   ScienceOn
7 Suh, Y. K., Kim, B. C. and Kim, Y. H., "Determination of Viscoelastic Property in Polyethylene Crystallization Using a Quartz Crystal Resonator," Sensors, 9, 9544-9558(2009).   DOI   ScienceOn
8 Garg, A., Heflin, J. R., Gibson, H. W. and Davis, R. M., "Study of Film Structure and Adsorption Kinetics of Polyelectrolyte Multilayer Films: Effect of pH and Polymer Concentration," Langmuir, 24, 10887-10894(2008).   DOI   ScienceOn
9 Kim, B. C., Yamamoto, T. and Kim, Y. H., "Measurement of Adsorption Characteristic Using a Quartz Crystal Resonator," Korean Chem. Eng. Res., 47, 368-372(2009).