Model Identification for Control System Design of a Commercial 12-inch Rapid Thermal Processor |
Yun, Woohyun
(Department of Chemical and Biomolecular Engineering, Sogang University)
Ji, Sang Hyun (KORNIC Systems Co., Ltd.) Na, Byung-Cheol (KORNIC Systems Co., Ltd.) Won, Wangyun (Department of Chemical and Biomolecular Engineering, Sogang University) Lee, Kwang Soon (Department of Chemical and Biomolecular Engineering, Sogang University) |
1 | May, G. S. and Sze, S. M., Fundamentals of Semiconductor Fabrication, John Wiley, & Sons, NJ(2004) |
2 | Balakrishnan, K. S. and Edgar, T. F., "Model-based Control in Rapid Thermal Processing," Thin Solid Films, 365, 322-333 (2000) DOI ScienceOn |
3 | Lee, K. S., Lee, J., Chin, I., Choi, J. and Lee, J. H., "Control of Wafer Temperature Uniformity in Rapid Thermal Processing Using an Optimal Iterative Learning Control Technique, " Ind. Eng. Chem. Res., 40, 1661(2001) DOI ScienceOn |
4 | Private communication with engineers in Kornic Systems Co |
5 | Xiao, H., Introduction to Semiconductor manufacturing Technology, Prentice-Hall(2001) |
6 | Zhu, K., Robust and optimal control, Prentice-Hall, NJ(1996) |
7 | Cho, W., Edgar, T. F. and Lee, J., "Nonlinear Model Identification for Temperature Control in a Single Wafer Rapid Thermal Processing," submitted to I&ECR(2007) |
8 | Schaper, C. D., Moslehi, M. M., Sarawat, K. C. and Kailath, T., Modeling, "Identification, and Control of Rapid Thermal Processing Systems," J. Electrochem. Soc., 141, 3200(1994) DOI |
9 | Won, W., Yoon, J., Lee, K. S. and Lee, B., "Identification of MIMO State Space Model Based on MISO High-order ARX Model: Design and Application, " Korean Chem. Eng. Res., 45(1), 67-72 (2007) |
10 | Cho, Y. M. and Gyugyi, P., "Control of Rapid Thermal Processing: A System Theoretic Approach, " IEEE Trans. Contr. Sys. Tech., 5, 644(1997) DOI ScienceOn |
11 | Cho, M., Lee, Y., Joo, S. and Lee, K. S., "Semi-empirical Modelbased Multivariable Iterative Learning Control of an RTP System," IEEE Trans. Semiconductor Manufacturing, 18, 430(2005) DOI ScienceOn |