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http://dx.doi.org/10.14775/ksmpe.2021.20.02.101

Development of Real-time Flatness Measurement System of COF Film using Pneumatic Pressure  

Kim, Yong-Kwan (Ganghan Innosys)
Kim, JaeHyun (ASML)
Lee, InHwan (School of Mechanical Engineering, Chungbuk Nat'l UNIV.)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.20, no.2, 2021 , pp. 101-106 More about this Journal
Abstract
In this paper, an inspection system has been developed where pneumatic instruments are used to stretch the film using compressed air, thus the curl problem can be overcome. When the pneumatic system is applied, a line scan camera should be used instead of an area camera because the COF surface makes an arc by the air pressure. The distance between the COF and the inspection camera should be kept constant to get a clear image, thus the position of COF is to be monitored on real-time. An operating software has been also developed which is switching on/off the pneumatic system, determining the COF position using a camera vision, displaying the contour of the COF side view, sending self-diagnosis result and etc. The developed system has been examined using the actual roll of COF, which convince that the system can be an effective device to inspect the COF rolls in process.
Keywords
COF(Chip on film); Depth of Field; Field of View; Flatness; Working Distance;
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