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http://dx.doi.org/10.14775/ksmpe.2020.19.07.067

Variation of a Triangular Pattern Shape due to Shrinkage in the Repeated UV Imprint Process  

Jeong, Jiyun (HYUNDAI WIA Corp.)
Choi, Su Hyun (Department of Mechanical Engineering, Changwon National UNIV.)
Cho, Young Tae (Department of Mechanical Engineering, Changwon National UNIV.)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.19, no.7, 2020 , pp. 67-73 More about this Journal
Abstract
Shrinkage is inevitable in the curing of resins during the nanoimprint process. The degree of shrinkage that occurs as the resin transforms from a viscous liquid to solid differs depending on the type of resin. However, if the cured material is repeatedly cured using the same material, constant shrinkage can be confirmed. In this study, the pattern of change was observed by repeatedly performing the nanoimprint process using a resin with a constant shrinkage rate. The observed pattern for the change of shape was made using a triangular pyramid-shaped aluminum master mold and a flexible replica mold made from the master. Shrinkage that results from the nanoimprint process occurs linearly in the longitudinal direction of the pattern and can be predicted by simple calculations. The change of the pattern due to shrinkage occurred as expected. If the shrinkage rate remains constant, various patterns can be manufactured with high accuracy by correcting these changes before producing a specific shape. This study confirms that the pattern of the desired angle can be obtained by performing the repeated imprint without having to manufacture a master mold.
Keywords
Nanoimprint; Shrinkage; Viscosity; Repeated Imprint;
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Times Cited By KSCI : 6  (Citation Analysis)
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