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Development of Auto Positioning Laser System by using Image Measurement Data  

Pyo, Chang-Ryul (Department of Mechanical and Automotive Engineering INDUK University)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.12, no.3, 2013 , pp. 36-40 More about this Journal
Abstract
Recently, electronic equipments become smaller, more functional, and more complex than before. As these trends, MLC(multi-layer ceramic) circuit has been emerged to a promising technology in semiconductor inspection industry. Especially, multi-layer ceramic which is consisted of many fine-pitch multi-hole is used to produce a semiconductor inspection unit. The hole is processed by UV laser. But, working conditions are changed all the time. Therefore real time measurement of fine-pitch multi-hole is very important method for ensuring performance. In this paper we found the best method for illuminating and auto focusing. And, we verified our equipment.
Keywords
Auto Focusing; MLC circuit; Image Processing; UV Laser; Coaxial Illumination;
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Times Cited By KSCI : 1  (Citation Analysis)
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