Browse > Article

Basic Experimental Investigations to UV Laser Micro-Machining of Nano-Porous Alumina Ceramic Material  

Shin, Bo-Sung (부산대학교 정밀정형 및 금형가공연구소(ERC/NSDM))
Lee, Jung-Han (부산대학교 대학원 기계공학과)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.11, no.1, 2012 , pp. 62-67 More about this Journal
Abstract
Recently UV laser is widely used to process micro parts using various materials such as polymers, metals and ceramics because it has a very high intensity at the focused spot area. It is generally known that there are still some difficulties for alumina($Al_2O_3$) ceramics to directly make micro patterns like holes and lines on the surface of working material using 355nm UV laser because the alumina has a very low absorption coefficient at that wavelength. But nowadays new alumna with nano-porous holes is developed and applied to advanced micro functional parts of IT, BT and BT industries. In this paper, we are going to show the mechanism of photo-thermal ablation for nano-porous ceramics. Inside hole there is a lot of multiple reflections along the depth of hole. Experimentally we can find the micro hole drilling and micro grooving on the surface of nano-porous alumina.
Keywords
UV Laser; Galvano Scanner; Micro-Machining; Nano-Porous Alumina; Optical Absorption;
Citations & Related Records
연도 인용수 순위
  • Reference
1 The Korean Ceramic Society, "www.kcers.or.kr", 세라믹스 정보
2 Perrie, W., Rushton, A., Gill, M., Fox, P. and O., Neill, W., "Femtosecond laser micro-structuring of alumina ceramic", Appl. Surf. Sci, Vol. 248(1-4), pp. 213-217, 2005.   DOI
3 Pandey, P. C. and Shan, H. S., "Modern Machining Processes", McGrawHill, New Delhi, 1980.
4 Longfellow, J., "High speed drilling in alumina substrates with a $CO_2$ laser", Am. Ceram. Soc. Bull., Vol. 50(3), pp. 251-253, 1971.
5 Samant, A. N. and Dahotre, N. B., "Computational predictions in single dimensional laser machining of alumina", Int. J. Mach. Tools Manuf., Vol. 48, pp. 1345-1353, 2008   DOI
6 Glaw, V., Hahn, R., Paredes, A., Hein, U., Ehrmann, O. and Reichl, H., "Laser machining of ceramics and silicon for MCM-D applications", In Proceedings of the 3rd International Symposium on Adv. Packaging Mater, pp. 173-176, 1997.
7 Fei Zhang, Jun Duan., Xiaoyan Zeng, Yu Cao, "UV laser microprocessing and post chemical etching on ultrathin $Al_2O_3$ ceramic substrate", Journal of the European Ceramic Society, Vol. 31, pp. 1631-1639, 2011.   DOI
8 Dahotre, N. B. and Harimkar, S. P., Laser Fabrication and Machining of Materials. Springer, New York, NY, 2008.
9 Shin. B.S., Oh. J.Y. and Sohn. H., "theoretical and experimental investigations into laser ablation of polyimide and copper films with 355nm Nd:YVO4 laser", Journal of Materials Processing Technology, Vol. 187-188, pp. 260-263, 2007.   DOI
10 "http://www.matweb.com"
11 Ananthapadmanabhan, P. V., Thiyagarajan, T. K., Sreekumar, K. P. and Venkatramani, N., Formation of nano-sized alumina by in-flight oxidation of aluminium powder in a thermal plasma reactor. Scr. Mater., Vol. 50(1), pp. 143-147, 2004.   DOI