Stress gradient relaxation and property modification of polysilicon films by ion implantation
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Seok, Ji-Won
(서울대학교 기계항공공학부)
Gang, Tae-Jun (서울대학교 기계항공공학부) Lee, Sang-Jun (서울대학교 기계항공공학부) Lee, Jae-Hyeong (한국원자력연구소) Lee, Jae-Sang (한국원자력연구소) Han, Jun-Hui (한국표준과학연구소) Lee, Ho-Yeong (서울대학교 기계항공공학부) Kim, Yong-Hyeop (서울대학교 기계항공공학부) |
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