High-rate, Low-temperature Deposition of Multifunctional Nano-crystalline Silicon Nitride Films |
Hwang, Jae-Dam
(Department of Nano Science and Technology, University of Seoul)
Lee, Kyoung-Min (Department of Nano Engineering, University of Seoul) Keum, Ki-Su (Department of Nano Science and Technology, University of Seoul) Lee, Youn-Jin (Department of Nano Science and Technology, University of Seoul) Hong, Wan-Shick (Department of Nano Science and Technology, University of Seoul) |
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