1 |
정진욱, 플라즈마 전자공학, 청문각 (2013).
|
2 |
염근영, 플라즈마 식각기술, 미래컴 (2006).
|
3 |
M. A. Lieberman and A. J. Lichitenberg, Principles of Plasma Discharges and Materials Processing, Wiley, New York (2005).
|
4 |
F. F. Chen, Plasma Physics and Controlled Fusion, Plenum Press, New York (1984).
|
5 |
P. Chabert and N. Braithwaite, Physics of Radio frequency Plasmas, Cambridge University Press, Cambridge (2011).
|
6 |
Samer Banna, Ankur Agarwal, Gilles Cunge, Maxime Darnon, Erwine Pargon, and Olivier Joubert, J. Vac. Sci. Technol. A 30, 040801 (2012).
|
7 |
N. Hershkowitz, Plasma Diagnostics, edited by O. Auciello and D. L. Flamm Academic, San Diego (1989).
|
8 |
C. Lee and M. A. Lieberman, J. Vac. Sci. Technol. A 13(2), 368 (1995).
DOI
|