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초대형 기판의 PR Strip을 위한 절연체 격벽 플라즈마 장치
초대형 기판의 PR Strip을 위한 절연체 격벽 플라즈마 장치
Park, Yeong-Chun
(HGU)
Lee, Bong-Ju
(KBSI)
Publication Information
Information Display
/
v.4, no.2
, 2003 , pp. 11-14
More about this Journal
More about this Journal
Frequency : Bimonthly
Publisher : The Korean Infomation Display Society
KISTI Subject :
SCOPUS Subject :
Energy (miscellaneous)
,
Energy Engineering and Power Technology
,
Mechanical Engineering
,
Mechanics of Materials
,
Surfaces and Interfaces
Web of Science Subject :
Thermodynamics
,
Acoustics
,
Automation &control Systems
,
Engineering, Mechanical
,
Engineering, Multidisciplinary
,
Instruments &instrumentation
,
Mechanics
,
Robotics
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