Browse > Article
http://dx.doi.org/10.3365/KJMM.2011.49.6.493

Fabrication and Evaluation of Al Targets using the SPS Technique and their Sputter Fabricated Films  

Hyun, Hye Young (Measurement & Analysis Team, National Nanofab Center, Applied Materials Science and Engineering Division, Hanbat National University)
Kim, Min Jung (Measurement & Analysis Team, National Nanofab Center)
Yoo, Jung Ho (Measurement & Analysis Team, National Nanofab Center)
Jeong, Chil Seong (Measurement & Analysis Team, National Nanofab Center)
Yang, Jun-Mo (Measurement & Analysis Team, National Nanofab Center)
Oh, Ik Hyun (Korea Institute of Industrial Technology)
Park, Hyun-Kuk (Korea Institute of Industrial Technology)
Lee, Seung Min (Korea Institute of Industrial Technology)
Oh, Yong Jun (Applied Materials Science and Engineering Division, Hanbat National University)
Publication Information
Korean Journal of Metals and Materials / v.49, no.6, 2011 , pp. 493-497 More about this Journal
Abstract
The basic properties and electrical characteristics of sputtering films deposited with a commercial cast target and spark plasma sintering (SPS) were compared and analyzed. The results, revealed that, the Al film prepared by heating at $60^{\circ}C/min$ (SPS process) showed a specific resistance similar to the commercial cast Al film. In addition, the results of XRD, SIMS and TEM, showed that there was not much difference in the crystal structure and impurities between the two films. Consequently, the SPS Al target was found to have properties quite similar to the commercial one and it is expected to be applied in future research to the metal wiring material for semiconductor/display devices.
Keywords
Al target; sputtering film; spark plasma sintering; evaluation;
Citations & Related Records

Times Cited By SCOPUS : 0
연도 인용수 순위
  • Reference
1 G. Bertrand, S. Deleonibus, B. Previtali, G. Guegan, X. Jehl, M. Sanquer, and F. Balestra, Solid-State Electron 48, 505 (2004).   DOI   ScienceOn
2 M. Tokita, Proc. NEDO Int. Symp. on Funct. Graded Mater. p. 23 (1999).
3 O. Yanagisawa, H. Kuramoto, K. Matsugi, and T. Hatayama, Proc. NEDO Int. Symp. on Funct. Graded Mater. p. 127 (1999).
4 H. Y. Hyun, M. J. Kim, J. H. Yoo, M. S. Hyun, J. -M. Yang, I. H. Oh, S. M. Lee, and Y. J. Oh, Kor. J. Met. Mater. 49, 250 (2011).   DOI   ScienceOn
5 D. William, Materials Science and Engineering, 6th Edition, p. 649 (2004).
6 K. H. Kim, J.-M. Yang, C. W. Ahn, H. S. Seo, I. S. Kang, and W. J. Hwang, J. Kor. Inst. Met. & Mater. 46, 458 (2008).
7 S. Kalpakjian, Manufacturing Engineering and Technology, 4th Edition (1989).