Fabrication and Evaluation of Al Targets using the SPS Technique and their Sputter Fabricated Films
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Hyun, Hye Young
(Measurement & Analysis Team, National Nanofab Center, Applied Materials Science and Engineering Division, Hanbat National University)
Kim, Min Jung (Measurement & Analysis Team, National Nanofab Center) Yoo, Jung Ho (Measurement & Analysis Team, National Nanofab Center) Jeong, Chil Seong (Measurement & Analysis Team, National Nanofab Center) Yang, Jun-Mo (Measurement & Analysis Team, National Nanofab Center) Oh, Ik Hyun (Korea Institute of Industrial Technology) Park, Hyun-Kuk (Korea Institute of Industrial Technology) Lee, Seung Min (Korea Institute of Industrial Technology) Oh, Yong Jun (Applied Materials Science and Engineering Division, Hanbat National University) |
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