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Electron Beam Evaporated ITO Transparent Electrode for Highly Efficiency GaN-based Light Emitting Diode  

Seo, Jae Won (Department of Materials Science and Metallurgical Engineering, Sunchon National University)
Oh, Hwa Sub (Department of Materials Science and Metallurgical Engineering, Sunchon National University)
Kang, Ki Man (Department of Materials Science and Metallurgical Engineering, Sunchon National University)
Moon, Seong Min (Department of Materials Science and Metallurgical Engineering, Sunchon National University)
Kwak, Joon Seop (Department of Materials Science and Metallurgical Engineering, Sunchon National University)
Lee, Kuk Hwe (Epiplus Co., Ltd.)
Lee, Woo Hyun (Epiplus Co., Ltd.)
Park, Young Ho (Epiplus Co., Ltd.)
Park, Hae Sung (Epiplus Co., Ltd.)
Publication Information
Korean Journal of Metals and Materials / v.46, no.10, 2008 , pp. 683-690 More about this Journal
Abstract
In order to develop transparent electrodes for high efficiency GaN-based light emitting diodes (LEDs), the electrical and optical properties of the electron beam evaporated ITO contacts have been investigated as a function of the deposition temperature and flow rate of oxygen during the deposition. As the deposition temperature increases from $140^{\circ}C$ to $220^{\circ}C$, the resistivity of the ITO films decreases slightly from $4.0{\times}10^{-4}{\Omega}cm$ to $3.3{\times}10^{-4}{\Omega}cm$, meanwhile the transmittance of the ITO films significantly increases from 67% to 88% at the wavelength of 470 nm. When the flow rate of oxygen during the deposition increases from 2 sccm to 4 sccm, the resistivity of the ITO films increases from $3.6{\times}10^{-4}{\Omega}cm$ to $7.4{\times}10^{-4}{\Omega}cm$, meanwhile the transmittance of the ITO films increases from 86% to 99% at 470 nm. Blue LEDs fabricated with the electron beam evaporated ITO electrode show that the ITO films deposited at $200^{\circ}C$ and 3 sccm of the oxygen flow rate give a low forward-bias voltage of 3.55 V at injection current of 20 mA with a highest output power.
Keywords
ITO; ohmic contact; LED; electron beam evaporator;
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