Browse > Article
http://dx.doi.org/10.7842/kigas.2017.22.1.78

A Study of Explosion Hazard Proof Modeling for Risk Minimization to Semiconductor & FPD Manufature Equipment and Clean Room  

Noh, HyunSeok (Dept. of Safety Engineering, Incheon National University)
Woo, InSung (Dept. of Safety Engineering, Incheon National University)
Hwang, MyungHwan (Dept. of Safety Engineering, Incheon National University)
Woo, JungHwan (Dept. of Electrical and Computer Engineering, Texas A&M University)
Publication Information
Journal of the Korean Institute of Gas / v.22, no.1, 2018 , pp. 78-85 More about this Journal
Abstract
In this study, we analyzed risks of the fabrication process equipment and cleanroom for semiconductor/flat panel display (FPD) manufacturing facilities and studied the fundamental safety measures for the risk factors. We examined the explosion proof design models considering the specificity of equipment and environment, and planned to utilize the findings to provide technical standards and grounds for designing and manufacturing related equipment. We believe that this study will contribute to the establishment of technical standards for semiconductor/FPD industry and businesses in many different ways by providing optimized modeling of high-risk explosion site detection, developing safety standards and hazard countermeasures and voluntary activation of safety certification system for operation of fabrication process equipment.
Keywords
semiconductor; FPD manufacturing facilities; risk minimization;
Citations & Related Records
연도 인용수 순위
  • Reference
1 한국산업표준, "KSC IEC 60079-10-1 : 2012 폭발 분위기-제10-1부:폭발위험 장소의 구분", 2012
2 Energy Institute, "EI-15 Area Classification Code for Installations Handling Flammable Fluids" 2005 3rd edition
3 NFPA 497 Recommended Practice for the Classification of Flammable Liquids, Gases or Vapors and of Hazardous (Classified) Locations for Electrical Installations in Chemical Process Areas
4 한국화재보험협회. " 반도체공업 위험관리 ", 2012, pp.18-21
5 김광일, 반도체 산업에서의 사고사례분석 및 안전대책 방안, 한국화재소방학회지 10권 1호. 1996, pp49-50.
6 API 505 Classification of locations for electrical installations at petroleum facilities classified as Class 1, Zone 0, zone 1, and zone 2