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Development of Micro Turbine based on MEMS Technology  

전병선 (서울대학교 기계항공공학부)
박건중 (서울대학교 기계항공공학부)
민홍석 (서울대학교 재료공학부)
김세준 (서울대학교 기계항공공학부)
송성진 (서울대학교 기계항공공학부)
주영창 (서울대학교 재료공학부)
민경덕 (서울대학교 기계항공공학부)
Publication Information
Journal of the Korea Institute of Military Science and Technology / v.5, no.3, 2002 , pp. 120-124 More about this Journal
Abstract
Microturbine refers to turbines on the scale of centimeters which can transmit power on the order of tens of Watts. Such devices can be used as propulsion or power generation devices for various military systems. An interdisciplinary team at Seoul National University has designed, and fabricated such a device, and this paper describes each phase. A commercial code has been used for design, and MEMS processes have been used for manufacturing. Finally, some preliminary test results are presented.
Keywords
Micro Power System; Micro Turbine; MEMS; DRIE; High Aspect Ratio; Bonding;
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  • Reference
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