Catalytic Decomposition of NF3 by Thermal Decomposition and Hydrolysis of γ-Al2O3

In this study, the catalytic activity of ${\gamma}-Al_2O_3$ was investigated for the decomposition of $NF_3$. Reactions for $NF_3$ decomposition were carried out in the range of reaction temperature of $330{\sim}730^{\circ}C$ and GHSV of $3,000{\sim}15,000mL/g-cat{\cdot}h$ in a fixed-bed catalytic reactor system. Thermal decomposition of $NF_3$ was also performed in order to compare with the catalytic decomposition of $NF_3$. The conversion of $NF_3$ by the catalytic decomposition at $400^{\circ}C$ was four times higher than that of the thermal decomposition. It was confirmed that the reaction behavior of $NF_3$ over ${\gamma}-Al_2O_3$ exhibited two reaction pathways in the presence of steam. Fluorine in $NF_3$ over ${\gamma}-Al_2O_3$ was chemically absorbed to $AlF_3$ by the gas-solid reaction in the absence of steam. The catalytic decomposition of $NF_3$ occurred by hydrolysis with steam. It was also confirmed by FT-IR analysis that $NF_3$ was completely decomposed to NOx and HF above $500^{\circ}C$.

γ-Al2O3 촉매상에서 열분해와 가수분해에 의한 NF3 촉매분해 특성

본 연구에서는 $NF_3$의 분해를 위한 ${\gamma}-Al_2O_3$의 촉매활성을 조사하였다. $NF_3$ 분해반응은 고정층 촉매반응기에서 $330{\sim}730^{\circ}C$ 범위의 반응온도와 $3,000{\sim}15,000mL/g-cat{\cdot}h$의 공간속도 조건에서 수행되었고, $NF_3$의 열분해 반응이 촉매분해반응와 비교를 위하여 함께 수행되었다. $400^{\circ}C$의 촉매분해 반응에서 $NF_3$의 전화율은 열분해 반응보다 4배 정도 높았으며, ${\gamma}-Al_2O_3$상에서 $NF_3$의 반응거동은 스팀의 존재에 따라 두 가지 반응경로를 나타내는 것으로 확인되었다. 스팀이 존재하지 않은 조건에서는 기체-고체 반응에 의해서 $NF_3$에 함유된 불소성분은 $AlF_3$로 전이되고, 스팀이 존재하는 조건에서는 가수분해에 의한 촉매적 분해반응이 일어난다. 또한 $NF_3$는 $500^{\circ}C$ 이상에서 NOx와 HF로 완전히 분해되는 것으로 FT-IR분석에서 확인되었다.