Browse > Article

Electrical and Optical Properties of IZO Films Deposited on Polynorbornene Substrate  

Park, Sung-Hwan (Department of Chemical Engineering, Keimyung University)
Ha, KiRyong (Department of Chemical Engineering, Keimyung University)
Publication Information
Applied Chemistry for Engineering / v.20, no.6, 2009 , pp. 612-616 More about this Journal
Abstract
Transparent conductive oxide (TCO) films have been widely used in the field of flat panel display industry. Transparent conductive indium zinc oxide (IZO) thin films with excellent chemical stability have attracted much attention as an alternative material for indium tin oxide (ITO) films. In this study, using a $In_2O_3$ and ZnO powder mixture with a ratio of 90 : 10wt% as a target, IZO films were prepared on polynorbornene (PNB) substrates by electron beam evaporation. The effect of substrate temperature and $O_2$ introduction flow rate were investigated in terms of electrical and optical properties of deposited IZO films. The best electrical and optical properties we obtained from this study were sheet resistance value of $5.446{\times}10^2{\Omega}/{\boxempty}$ and optical transmittance of 87.4% at 550 nm at $O_2$ introduction flow rate of 4 sccm, deposition rate of $2{\AA}$/sec, thickness of 1000 $\AA$ and substrate temperature of $150^{\circ}C$.
Keywords
indium zinc oxide (IZO); polynorbornene (PNB); E-beam deposition; transparent conductive oxide (TCO); flat panel display;
Citations & Related Records
연도 인용수 순위
  • Reference
1 A. Kaijou, M. Ohyyama, M. Shibata, and K. Inoue, U. S. Patent 5,972,527 (1999)
2 K. Noda, H. Sato, H. Itaya, and M. Yamada, Jpn. J. Appl. Phys., 42, 217 (2003)   DOI
3 J.-M. Moon, J.-H. Bae, S.-W. Jeong, N.-J. Park, J.-W. Kang, and H.-K. Kim, J. of KIEEME (Korean), 19, 687 (2006)
4 H. J. Ha, J. S. Cho, and C. H. Park, J. of KIEEME, 8, 699 (1995)
5 H. M. Kim, S. K. Jeung, J. S. Ahn, Y. J. Kang, and C. K. Je, Jpn. J. Appl. Phys., 42, 223 (2003)   DOI
6 S. H. Park, H. M. Kim, B. R. Rhee, and E. Y. Gyo, Jpn. J. Appl. Phys., 42, 1429 (2001)
7 S. Angiolini and M. Avidano, SID 03 DIGEST, 47, 1 (2003)
8 N. Naghavi, L. Dupont, C. Marcel, C. Maugy, and A. Rougier, Electrochim. Acta, 46, 2007 (2003)   DOI   ScienceOn
9 J.-S. Hong, J.-K. Yoon, B.-R. Rhee, S.-H. Park, J.-J. Kim, and H.-M. Kim, Sae Mulli, 48, 339 (2004)
10 C.-H. Kim, J.-h. Lee, and B.-O. Park, Materials Science Forum, 449-452, 469 (2004)
11 R. K. Jain and R. C. Lind, J. Opt. Soc. Am., 73, 647 (1983)   DOI   ScienceOn