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p-Toluenesulfonate Ester Derivatives of Benzendiol as Novel Acid Amplifiers  

Kang, Ji Eun (Pukyong National University)
Hong, Kyoun Il (Korea Research Institute of Chemical Technology)
Lim, Kwon Taek (Pukyong National University)
Jeong, Yeon Tae (Pukyong National University)
Publication Information
Applied Chemistry for Engineering / v.16, no.5, 2005 , pp. 660-663 More about this Journal
Abstract
Aiming the development of novel acid amplifiers, 2-hydroxyphenyl-4-methylbenzenesulfonate (1), 3-hydroxyphenyl-4-methylbenzene sulfonate (2), 4-hydroxyphenyl-4-methylbenzenesulfonate (3) were synthesized as the aromatic acid amplifiers with good thermal stability. They were autocatalytically generated p-toluenesulfonic acid in the presence of small amount of acid evolved from a photoacid generator. These aromatic sulfonates showed excellent thermal stability in PtBMA film and were proven to be the first aromatic acid amplifier to act as a photosensitivity enhancer. When these compounds were coupled with a chemically amplified photoresist system, photosensitivity was enhanced up to 3~6 folds.
Keywords
acid amplifier; photoacid generator; chemically amplified photoresist;
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