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Characterization of Al Thin Films Prepared by Sputtering  

Moon, Myung-Jun (Department of Industrial Chemistry, Pukyong National University)
Lee, Jung-Mu (Department of Industrial Chemistry, Pukyong National University)
Jeon, Jong-Tak (Hanjin Heavy Industries & Construction Co., Ltd)
Jung, Bong-Kue (Korea Testing and Research Institute for Chemical Industry)
Lee, Gun-Dae (Department of Industrial Chemistry, Pukyong National University)
Publication Information
Applied Chemistry for Engineering / v.15, no.4, 2004 , pp. 393-401 More about this Journal
Abstract
Reflective Al thin films were prepared by sputtering. The effects of deposition conditions and substrates on the reflectivity of Al thin films were investigated. The reflectivity of Al thin film increased with decreasing deposition pressure. Within the range of $100{\sim}400\;W$ of RF power, the highest reflectivity was obtained at 200 W. The Al thin film deposited on the glass substrate showed higher reflectivity than that on polycarbonate; this may be due to the lower thermal expansion coefficient of glass. It was found from the observation of Al film using atomic force microscopy that the reflectivity of Al thin film increased with increasing grain size and decreasing surface roughness. From the result of X-ray diffraction measurements, it was shown that the peak intensity of (111) phase in Al film increased with lowering chamber pressure, leading to increased reflectivity.
Keywords
Al thin films; sputtering; reflectivity; deposition pressure; RF power;
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1 반사형 LCD의 기술현황 /
[ 서대식 ] / 전기전자재료
2 Optimization of the reflectivity of magnetron sputter deposited silver films /
[ Vergohl, M.;Malkomes, N.;Szyszka, B.;Neumann, F.;Matthee, T. ] / J. Vac. Sci. Technol.
3 Surface roughness of alumina films deposited by reactive r.f. sputtering /
[ Zhao, Y.;Qian, Y.;Yu, W.;Chen, Z. ] / Thin Solid Films   DOI
4 Texture development in silver films deposited by ionised magnetron sputter deposion /
[ Chiu, K.F.;Barber, Z.H. ] / Thin Solid Films   DOI
5 Development of textures during the growth of silver films condensed in vacuum on glass /
[ Gittis, A.;Dobrev, D. ] / Thin Solid Films   DOI
6 Factors influencing the nucleation of silver on plastic substrates /
[ Bishop, C.A.;Howson, R.P.;Ridge, M.I. ] / Thin Solid Films   DOI   ScienceOn
7 Argon incorporation effects on the conductivity of metal layers /
[ Stambouli, V.;Burat, O.;Bouchier, D. ] / Thin Solid Films   DOI
8 Handbook of Deposition Technologies For Films and Coatings /
[ Bunshah, R.F. ] /
9 The specular reflectivity of dc magnetron sputtered Al-1%-Si films /
[ Wilson, R.J.;Weiss, B.L. ] / Vaccum   DOI   ScienceOn
10 Better aluminium mirrors by integrating plasma pretreatment, sputtering, and plasma polymerization for large-scale car headlight production /
[ Grunwald, H.;Adam, R. ] / Surf. Coat. Technol.   DOI   ScienceOn
11 Ion-assisted deposition of silver thin films /
[ Lee, C.C.;Lee, T.Y.;Jen, Y.J. ] / Thin Solid Films   DOI   ScienceOn
12 Low temperature growth of rutile <TEX>$TiO_2$</TEX> films in modified rf magnetron sputtering /
[ Okimura, K. ] / Surf. Coat. Technol.   DOI
13 Silver-based low-emissivity coatings for architectural windows: Optical and structural properties /
[ Martin-Palma, R.J.;Vazquez, L.;Martinez-Duart, J.H.;Riera, M. ] / Sol. Energy Material Sol. Cells   DOI
14 Microstructure modification of silver films deposited by ionized magnetron sputter deposition /
[ Chiu, K.F.;Blamire, M.G.;Barber, Z.H. ] / J. Vac. Sci. Technol.
15 Ni-Cr passivation of very thin Ag films for low-emissivity multilayer coatings /
[ Martin-palma, R.J.;Matinez-Duart, J.M. ] / J. Vac. Sci. Technol.
16 속경화성 피복조성물과 이를 도포한 자동차 헤드램프 반사경 /
[ 성재갑 ] /
17 Structural and optical properties of silver thin films deposited by RF magnetron sputtering /
[ Rizzo, A.;Tagliente, M.A.;Alvisi, M.;Scaglione, S. ] / Thin Solid Films   DOI
18 Deposition of indium tin oxide films on polycarbonate substrates by raido-frequency magnetron sputtering /
[ Wu, W.F.;Chiou, B.S. ] / Thin Solid Films   DOI
19 Preparation and characterization of nanostructured silver thin films deposited by radio frequency magnetron sputtering /
[ Xiong, Y.;Wu, H.;Guo, Y.;Sun, Y.;Yang, D.;Da, D. ] / Thin Solid Films   DOI
20 Stress-related effects in thin films /
[ Thornton;Hoffman, D.W. ] / Thin Solid Films   DOI   ScienceOn
21 The influenc of surface grown Ag particle on the optical absorption of <TEX>$Ag/SiO_2$</TEX> nano-compostion film /
[ Ba, L.;Zhang, L.;Wang, X. ] / Solid State Communications   DOI   ScienceOn
22 Variation of laser mirror metal microstructure and its effect on reflectivity at 10.6 <TEX>${\mu}m$</TEX> /
[ Szilva, W.A.;Murr, L.E. ] / Phys. Stat. Sol.   DOI   ScienceOn
23 Silver thin films deposited by magnetron sputtering /
[ Marechal, N.;Quesnel, E. ] / Thin Solid Films   DOI
24 Industrial Plasma Engineering, Vol. 1 /
[ Roth, J.R. ] /
25 PVD Ion Plating법에 의한 Ag 박막의 형성과 특성 평가 /
[ 이경황 ] /
26 Sol-Gel protection of front surface silver and Aluminum mirrors /
[ Morales, A.;Duran, A. ] / J. Sol-Gel Science and Technology
27 Metallization of plastics by magnetron sputtering for application of membrane switching /
[ Nyaiesh, A.R.;Watson, J.D.;Morgon, J. ] / Vaccum   DOI   ScienceOn