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http://dx.doi.org/10.6111/JKCGCT.2021.31.4.190

Figure of merit and bending characteristics of Mn-SnO2/Ag/Mn-SnO2 tri-layer film  

Cho, Youngsoo (Department of Advanced Materials Engineering, Chungbuk National University)
Jang, Guneik (Department of Advanced Materials Engineering, Chungbuk National University)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.31, no.4, 2021 , pp. 190-195 More about this Journal
Abstract
Typical Mn-SnO2/Ag/Mn-SnO2 tri-layer films were prepared on a PET substrate by RF/DC magnetron sputtering method at room temperature. Based on EMP simulation, the thicknesses of the top and bottom Mn-doped SnO2 layers were kept at 40 nm and the Ag layer was maintained at 13 nm for continuous electrical conduction. The experimentally measured optical transmittances at 550 nm wavelength were ranged from 82.9 to 88.1 % and sheet resistances were varied from 5.9 to 6.9 Ω/☐. The highest value of figure of merit, ϕTC was 48.1 × 10-3 Ω-1. Based on bending test under 4 and 5 mm of inner and outer curvature radius condition, tri-layer film resistance varies only by approximately 1.5 % after 10,000 bending cycles, showing excellent mechanical flexibility.
Keywords
OMO; Transmittance; Sheet resistance; Figure of merit; Bending test;
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1 S. Vedraine, A.E. Hajj, P. Torchio and B. Lucas, "Optimized ITO-fee tri-layer electrode for organic solar cells", Org. Electron. 14 (2013) 1122.   DOI
2 J.C. Hwang, M.C. Choi and Y. Ha, "Effect of side groups in polynorbornene films for transparent conductive substrates", J. Nanosci. Nanotechnol. 11(2011) 550.   DOI
3 Y. Cho, N.S. Parmar, S. Nahm and J.W. Choi, "Essential macleod program (EMP) simulated fabrication of high quality Zn:SnO2/Ag/Zn:SnO2 multilayer transparent conducting electrode on flexible substrates", Ceram. Int. 43 (2017) 7216.   DOI
4 J.J. Lee, J.Y. Ha, W.K. Choi, Y.S. Cho and J.W. Choi, "Doped SnO2 transparent conductive multilayer thin film explored by continuous composition spread", ACS Comb. Sci. 17 (2015) 247.   DOI
5 G. Haacke, "New figure of merit for transparent conductors", Appl. Phys. 47 (1976) 4086.   DOI
6 C. Loka, S.W. Moon, Y.S. Choi and K.S. Lee, "High transparent and conductive TiO2/Ag/TiO2 multilayer electrode films deposited on sapphire substrate", Electro. Mater. Let. 14 (2018) 125.   DOI
7 J.H. Kim, D.S. Kim, S.K. Kim, Y.Z. Yoo, J.H. Lee, S.W. Kim and T.Y. Seong, "Highly flexible Al-doped ZnO/Ag/Al-doped ZnO multilayer films deposited on PET substrates at room temperature", Ceram. Int. 42 (2016) 3473.   DOI
8 Y.S. Kim, W.J. Hwang, K.T. Eun and S.H. Choa, "Mechanical reliability of transparent conducting IZTO film electrodes for flexible panel displays", Appl. Surf. Sci. 257 (2011) 8134.   DOI
9 T.K. Kim and G.E. Jang, "Influence of oxygen flow rate on optical and electrical properties of SnO2/Ag/SnO2 multilayer thin film deposited on flexible substrate", J. Ceram. Process. Res. 18 (2017) 792.   DOI
10 K.N. Chen, C.F. Yang, C.C. Wu and Y.H. Chen, "Development of the α-IGZO/Ag/α-IGZO triple-layer structure films for the application of transparent electrode", Mater 10 (2017) 226.   DOI
11 A. Kumar and C. Zhou, "The race to replace tin-doped indium oxide : which material will win?", ACS Nano 4 (2010) 11.   DOI
12 G. Gustafsson, Y. Cao, G.M. Treacy, F. Klavetter, N. Colaneri and A.J. Heeger, "Flexible light-emitting diodes made from soluble conducting polymers", Nature 357 (1992) 477.   DOI
13 Q. Wan, E.N. Dattoli and W. Lu, "Transparent metallic Sb-doped SnO2 nanowires", Appl. Phys. Lett. 90 (2007) 222107.   DOI
14 E. Fortunato, D. Ginley, H. Hosono and D. C. Paine, "Transparent conducting oxides for photovoltaics", MRS Bull 32 (2007) 242.   DOI
15 D.S. Hecht, L. Hu and G. Irvin, "Emerging transparent electrodes based on thin films of carbon nanotubes, graphene, and metallic nanostructures", Adv. Mater. 23 (2011) 1482.   DOI
16 D.S. Ginley and C. Bright, "Transparent conducting oxides", MRS Bull 25 (2000) 15.
17 G. Torrisi, I. Crupi, S. Mirabella and A. Terrasi, "Robustness and electrical reliability of AZO/Ag/AZO thin film after bending stress", Sol. Energy Mater: Sol. Cells 165 (2017) 88.   DOI
18 M.S, Oh, S.H, Kim and T.Y. Seong, "Growth of nominally undoped p-type ZnO on Si by pulsed-laser", Appl. Phys. Lett. 87 (2005) 122103.   DOI
19 C. Guillen and J. Herrero, "ITO/metal/ITO multilayer structures based on Ag and Cu metal films for high-performance transparent electrodes", Sol. Energy Mater. Sol. Cells 92 (2008) 938.   DOI