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http://dx.doi.org/10.6111/JKCGCT.2021.31.1.037

Effect of composition on the structural and thermal properties of TiZrN thin film  

Choi, Byoung Su (Department of Nano Fusion Technology, Pusan National University)
Um, Ji Hun (Department of Nanomechatronics Engineering, Pusan National University)
Seok, Min Jun (Department of Nanomechatronics Engineering, Pusan National University)
Lee, Byeong Woo (Department of Ocean Advanced Materials Convergence Engineering, Korea Maritime & Ocean University)
Kim, Jin Kon (Department of Nanomechatronics Engineering, Pusan National University)
Cho, Hyun (Department of Nanomechatronics Engineering, Pusan National University)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.31, no.1, 2021 , pp. 37-42 More about this Journal
Abstract
The effect of chemical composition on the structural and thermal properties of TiZrN thin films was studied. As the Zr fraction in the deposited TixZr1-xN (x = 0.87, 0.82, 0.7, 0.6, and 0.28) increased, microstructural changes consisted of reduction in the grain size and a gradual transition from columnar structure to granular structure were observed. In addition, it was also confirmed that a gradual crystal phase transition from TiN to TiZrN has occurred as the Zr fraction increased up to 0.4. After heat treatment at 900℃, Ti0.82Zr0.18N and Ti0.7Zr0.3N layers were converted to a form in which rutile phase TiO2 and TiZrO4 oxides coexist, while Ti0.6Zr0.4N layer was converted to TiZrO4 oxide. Among the five compositions of TiZrN films, the Ti0.6Zr0.4N showed the best high temperature stability and produced a significant enhancement in the thermal oxidation resistance of Inconel 617 through suppressing the surface diffusion of Cr caused by thermal oxidation of the Inconel 617 substrate.
Keywords
TiZrN film; rf magnetron sputtering; Film composition; Structural properties; Thermal properties;
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Times Cited By KSCI : 1  (Citation Analysis)
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