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http://dx.doi.org/10.6111/JKCGCT.2020.30.6.220

Gas phase synthesis of Ga2O3 nanoparticles from gallium metal  

Park, Jung Won (Quanta Materials)
Won, Chang Min (School of Materials Science and Engineering, Andong National University)
Kwon, Jun Beom (Quanta Materials)
Lee, Hyukjae (School of Materials Science and Engineering, Andong National University)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.30, no.6, 2020 , pp. 220-225 More about this Journal
Abstract
Gallium oxide nano-powder, the key starting material for IGZO target, is fabricated by gas phase synthesis using a new apparatus consist of reaction, transportation, and collection parts. As a result of gallium metal evaporation above 1150℃, Ga2O3 nano-powders, are successfully synthesized. The SEM images of the synthesized powders displace the spherical shaped powders without severe agglomeration. X-ray diffraction and PSA analysis show that the higher temperature at the reaction part results in the better crystallinity and larger powder size of the synthesized Ga2O3. To see the applicability to IGZO target, Ga2O3 nano-powders synthesized at 1250℃ are mixed with indium oxide and zinc oxide (In2O3 : Ga2O3 : ZnO = 1 : 1 : 1), and then sintered at 1400~1500℃. The highest sintered density of 5.83 g/㎤ (= 91 % of relative density) is achieved when sintered at 1450℃, showing better sinterability compared to the commercially available Ga2O3 powder, which has 5.61 g/㎤ of sintered density at the same condition.
Keywords
Gas-phase synthesis; Nanoparticles; Gallium oxide; Gallium metal;
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Times Cited By KSCI : 2  (Citation Analysis)
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